• Chinese Physics B
  • Vol. 29, Issue 10, (2020)
Jie-Yu Li1,2, Yang Wang1,2,†, Dan-Dan Jia1,2, Wei-Peng Wei1,2, and Peng Dong3
Author Affiliations
  • 1School of Physics and Optoelectronics, Xiangtan University, Xiangtan 405, China
  • 2Hunan Engineering Laboratory for Microelectronics, Optoelectronics and System on A Chip, Xiangtan 411105, China
  • 3SuperESD Microelectronics Technology CO., LTD., Changsha 410100, China
  • show less
    DOI: 10.1088/1674-1056/ab9f28 Cite this Article
    Jie-Yu Li, Yang Wang, Dan-Dan Jia, Wei-Peng Wei, Peng Dong. New embedded DDSCR structure with high holding voltage and high robustness for 12-V applications[J]. Chinese Physics B, 2020, 29(10): Copy Citation Text show less
    Cross-section view of 2-finger DDSCR of (a) MDDSCR, (b) EMDDSCR, and (c) NPEMDDSCR.
    Fig. 1. Cross-section view of 2-finger DDSCR of (a) MDDSCR, (b) EMDDSCR, and (c) NPEMDDSCR.
    Equivalent circuit of 2-finger DDSCR of (a) MDDSCR, (b) EMDDSCR, and (c) NPEMDDSCR.
    Fig. 2. Equivalent circuit of 2-finger DDSCR of (a) MDDSCR, (b) EMDDSCR, and (c) NPEMDDSCR.
    TCAD simulated cross section of (a) MDDSCR, (b) EMDDSCR, and (c) NPEMDDSCR.
    Fig. 3. TCAD simulated cross section of (a) MDDSCR, (b) EMDDSCR, and (c) NPEMDDSCR.
    Total current-flow-line at (a) the trigger point, (b) the holding point, and (c) the high ESD current pulse. In the legends of the figure, Si3N4 and SiO2 symbolize Si3N4 and SiO2 respectively. Number 3.43e + 04 equals to 3.43 × 104.
    Fig. 4. Total current-flow-line at (a) the trigger point, (b) the holding point, and (c) the high ESD current pulse. In the legends of the figure, Si3N4 and SiO2 symbolize Si3N4 and SiO2 respectively. Number 3.43e + 04 equals to 3.43 × 104.
    Impact ionization of (a) MDDSCR, (b) EMDDSCR, and (c) NPEMDDSCR.
    Fig. 5. Impact ionization of (a) MDDSCR, (b) EMDDSCR, and (c) NPEMDDSCR.
    Comparisons of TLP characteristic among MDDSCR, EMDDSCR, and NPEMDDSCR.
    Fig. 6. Comparisons of TLP characteristic among MDDSCR, EMDDSCR, and NPEMDDSCR.
    Device nameForward/reverseVBD/VVt1/VVh/VIt2/AHBM/kV
    MDDSCRforward1719.6010.4011.8017.7
    reverse1719.507.6313.0719.6
    EMDDSCRforward1719.7410.606.8110.2
    reverse1719.6110.886.559.8
    NPEMDDSCRforward1718.5014.6011.7017.6
    reverse1719.6015.1910.9616.4
    Table 1. TLP data for MDDSCR, EMDDSCR, and NPEMDDSCR.
    Jie-Yu Li, Yang Wang, Dan-Dan Jia, Wei-Peng Wei, Peng Dong. New embedded DDSCR structure with high holding voltage and high robustness for 12-V applications[J]. Chinese Physics B, 2020, 29(10):
    Download Citation