Adaptive Planning Method of Spatial Scanning Range for White Light Interferometric Profiler

Ma Long; Lü Yi; Pei Xin; Jiao Zhichao; Zhang Hongyan; Hu Yanmin

doi:10.3788/lop54.061202

[1] Wu J J, Lei L H, Chen X, et al. A three-dimensional microdisplacement sensing system based on MEMS bulk-silicon technology［J］. Sensors, 2014, 14(11): 20533-20542.

[2] Wu Dongjiang, Zhou Siyu, Ma Guangyi, et al. Experiment of quartz glass flute precise thinning by femtosecond laser［J］. Chinese J Lasers, 2015, 42(3): 0303009.

[3] Wang Dawei, Gao Xifeng. Study on Kerf roughness differences between line and arc analysis and elimination of laser precision cutting［J］. Chinese J Lasers, 2015, 42(3): 0303005.

[4] Hu Dejin. Precision grinding and adaptive control method for hard and brittle aspheric optical mirror［J］. Acta Optica Sinica, 2016, 36(7): 0722004.

[5] Groot P D, Deck L. Surface profiling by analysis of white-light interferograms in the spatial frequency domain［J］. Journal of Modern Optics, 1995, 42(2): 389-401.

[6] Sandoz P. Wavelet transform as a processing tool in white-light interferometry［J］. Optics Letters, 1997, 22(14): 1065-1067.

[7] Li M, Quan C, Tay C J.Continuous wavelet transform for micro-component profile measurement using vertical scanning interferometry［J］. Optics & Laser Technology, 2008, 40(7): 920-929.

[8] Niehues J, Lehmann P, Bobey K. Dual-wavelength vertical scanning low-coherence interferometric microscope［J］. Applied Optics, 2007, 46(29): 7141-7148.

[9] Viotti M R, Albertazzi A, Fantin A V, et al. Comparison between a white-light interferometer and a tactile formtester for the measurement of long inner cylindrical surfaces［J］. Optics and Lasers in Engineering, 2008, 46(5): 396-403.

[10] Debnath S K, Kothiyal M P, Kim S W. Evaluation of spectral phase in spectrally resolved white-light interferometry: Comparative study of single-frame techniques［J］. Optics and Lasers in Engineering, 2009, 47(11): 1125-1130.

[11] Munteanu F. Self-calibrating lateral scanning white-light interferometry［J］. Applied Optics, 2010, 49(12): 2371-2375.

[12] Zou Wendong, Huang Changhui, Zheng Qiang, et al. Measurement of microscopic surface topography of alloy dimple fracture by scanning white-light interferometry［J］. Optics and Precision Engineering, 2011, 19(7): 1612-1619.

[13] Pacholik A, Mueller M, Fengler W, et al. GPU vs FPGA: Example application on white light interferometry［C］. 2011 International Conference on Reconfigurable Computing and FPGAs, 2011: 481-486.

[14] Schneider M, Fey D, Kapusi D, et al. Performance comparison of designated preprocessing white light interferometry algorithms on emerging multi- and many-core architectures［J］. Procedia Computer Science, 2011, 4: 2037-2046.

[15] Heikkinen V, Hanhijrvi K, Aaltonen J, et al. Hybrid light source for scanning white light interferometry-based MEMS quality control［C］. SPIE, 2011, 8082: 80822O.

[16] Chong W K, Li X, Soh Y C. Spectral effects of dual wavelength low coherence light source in white light interferometry［J］. Optics and Lasers in Engineering, 2013, 51(6): 651-655.

[17] Dong J T, Lu R S, Li Y, et al. Automated determination of best focus and minimization of optical path difference in Linnik white light interferometry［J］. Applied Optics, 2011, 50(30): 5861-5871.

[18] Guo Tong, Zhang Ying, Li Feng, et al. Measurement of large step structure by using white light speed-variable scanning interferometry［J］. Journal of Optoelectronics Laser, 2012, 23(8): 1529-1534.

[19] Ma Long, Zhang Hongyan, Niu Yifan, et al. Large range evaluation method based on white light scanning interferometry for aspheric optical elements［J］. Laser & Optoelectronics Progress, 2014, 51(6): 061207.

[20] Manske E, Jaeger G, Hausotte T, et al. Recent developments and challenges of nanopositioning and nanomeasuring technology［J］. Measurement Science and Technology, 2012, 23(7): 074001.

[21] Shavrin I, Lipiinen L, Kokkonen K, et al. Stroboscopic white-light interferometry of vibrating microstructures［J］. Optics Express, 2013, 21(14): 16901-16907.

[22] Ma Long, Wang Dan, Zhang Hongyan, et al. A low overlap rate and large scope 3-D stitching method of microstructures［J］. Journal of Optoelectronics Laser, 2015, 26(5): 910-918.

[23] Ullmann V, Eman S, Manske E. White-light interferometers with polarizing optics for length measurements with an applicable zero-point detection［J］. Measurement Science and Technology, 2015, 26(8): 084010.

[24] Song Dingan, Li Xinyang, Peng Zhenming. Application of robust control to adaptive optics systems: A summary and review［J］. Laser & Optoelectronics Progress, 2016, 53(6): 060001.

[25] Barnich O, Droogenbroeck M V. VIBE: A powerful random technique to estimate the background in video sequences［C］. IEEE International Conference on Acoustics, 2009: 945-948.