Bimorph mirrors based on the use of piezoelectric actuators are important part in some laser systems, such as 10.6 μm laser system. In order to deposit the bimorph mirror, the clamping ways and deposition temperature are first factors to be considered for two models with different clamping ways of bimorph mirror developed using FEA software. The distribution of deformation and stress of bimorph mirror due to thermal residual stress are calculated. Based on the results, we select the better clamping way to deposit the bimorph mirror. In order to predict the temperature rising of mirror surface induced by the 10.6 μm laser irradiation, the FEA models of bimorph mirrors with different mirror surface materials, which include the mono-crystalline silicon and quartz glass, are developed and calculated. Finally, the coated bimorph mirror is measured by spectrometer, and the average reflectance of enhanced coating is greater than 99.5% in 10.6 um. The coated bimorph deformable mirror is now applied in the 10.6um laser system and can satisfy the practical need.