• Acta Optica Sinica
  • Vol. 21, Issue 3, 380 (2001)
[in Chinese], [in Chinese], [in Chinese], and [in Chinese]
Author Affiliations
  • [in Chinese]
  • show less
    DOI: Cite this Article Set citation alerts
    [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Measurement of Converse Piezoelectric Expend and Contract of PZT with the Axial Response Curve of Fiber-Optical Confocal Scanning Imaging Microscope[J]. Acta Optica Sinica, 2001, 21(3): 380 Copy Citation Text show less

    Abstract

    By utilizing the axial response curve of fiber optical confocal scanning microscope, a new technique for measuring the micro position has been developed. Using this technique, the converse piezoelectric expend and contract of PZT with resolution as high as 5 nm was measured.
    [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Measurement of Converse Piezoelectric Expend and Contract of PZT with the Axial Response Curve of Fiber-Optical Confocal Scanning Imaging Microscope[J]. Acta Optica Sinica, 2001, 21(3): 380
    Download Citation