• Photonics Research
  • Vol. 11, Issue 12, 2113 (2023)
Xiyu Lu1、2, Yanjiao Guan1、2, Pengchang Yang1、2, Shan Niu1、2, Yu Ma1、2, Lijun Wang1、2, Ning Zhuo1、2, Jinchuan Zhang1、2, Shenqiang Zhai1、2, Fengmin Cheng1、2, Shuman Liu1、2, Fengqi Liu1、2, and Junqi Liu1、2、*
Author Affiliations
  • 1Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing Key Laboratory of Low Dimensional Semiconductor Materials and Devices, Beijing 100083, China
  • 2Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
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    DOI: 10.1364/PRJ.500047 Cite this Article Set citation alerts
    Xiyu Lu, Yanjiao Guan, Pengchang Yang, Shan Niu, Yu Ma, Lijun Wang, Ning Zhuo, Jinchuan Zhang, Shenqiang Zhai, Fengmin Cheng, Shuman Liu, Fengqi Liu, Junqi Liu, "Dual-mode distributed feedback quantum cascade laser based on stacked 3D monolithic integration for on-chip multi-channel gas sensing," Photonics Res. 11, 2113 (2023) Copy Citation Text show less
    Three-dimensional device structure diagram of coupled ridge dual-wavelength DFB QCL.
    Fig. 1. Three-dimensional device structure diagram of coupled ridge dual-wavelength DFB QCL.
    (a) Electroluminescence spectrum of the materials. ΔE1 and ΔE2 represent the gain spectra from the upper energy level to the two lower energy levels, respectively. (b) Coupling coefficient varies with the grating duty cycle and grating depth for the two wavelengths. The upper insets show the calculated modal profiles of λ1 emission with σ=0.5 (left) and λ2 emission with σ=0.6 (right), respectively. (c) Schematic diagram of bi-period grating formed by different photolithographic stripes. (d) The propagation waves correspond to the gratings of the same color in Fig. 1(c).
    Fig. 2. (a) Electroluminescence spectrum of the materials. ΔE1 and ΔE2 represent the gain spectra from the upper energy level to the two lower energy levels, respectively. (b) Coupling coefficient varies with the grating duty cycle and grating depth for the two wavelengths. The upper insets show the calculated modal profiles of λ1 emission with σ=0.5 (left) and λ2 emission with σ=0.6 (right), respectively. (c) Schematic diagram of bi-period grating formed by different photolithographic stripes. (d) The propagation waves correspond to the gratings of the same color in Fig. 1(c).
    Dependences of supermode loss and loss difference on (a) ridge period and (b) array etching depth at λ1=7.5 μm. Fundamental supermode near-field profiles of the seven-element coupled ridge waveguide structure at (c) λ1=7.05 μm and (d) λ1=7.5 μm calculated using COMSOL finite element method software.
    Fig. 3. Dependences of supermode loss and loss difference on (a) ridge period and (b) array etching depth at λ1=7.5  μm. Fundamental supermode near-field profiles of the seven-element coupled ridge waveguide structure at (c) λ1=7.05  μm and (d) λ1=7.5  μm calculated using COMSOL finite element method software.
    (a) Cross-sectional photographs of the actual coupling ridge portions for parameter sets 1 (left) and 2 (right). (b) Cross-sectional photograph of actual device mounted epi-side down onto the graphite heat-sink.
    Fig. 4. (a) Cross-sectional photographs of the actual coupling ridge portions for parameter sets 1 (left) and 2 (right). (b) Cross-sectional photograph of actual device mounted epi-side down onto the graphite heat-sink.
    (a) L-I-V curves at Tsink from 10°C to 40°C for a 2-mm-long QCL with ridge width WS1=7.5 μm. The inset shows Jth as a function of T in pulsed mode. The dashed line is the fitting result obtained using the exponential function Jth=J0 exp(T/T0). (b) L-I-V curves at Tsink from 20°C to 40°C for a 2-mm-long QCL with ridge width WS2=8.9 μm.
    Fig. 5. (a) L-I-V curves at Tsink from 10°C to 40°C for a 2-mm-long QCL with ridge width WS1=7.5  μm. The inset shows Jth as a function of T in pulsed mode. The dashed line is the fitting result obtained using the exponential function Jth=J0exp(T/T0). (b) L-I-V curves at Tsink from 20°C to 40°C for a 2-mm-long QCL with ridge width WS2=8.9  μm.
    Far-field profile along the ridge width direction at room temperature for a device with ridge period P1=9.5 μm, ridge width WS1=7.5 μm, and depth D1=2.3 μm. (a) Before λ2 lasing. (b) Lasing at dual wavelengths. Data fittings performed using the Gaussian function are represented by solid lines.
    Fig. 6. Far-field profile along the ridge width direction at room temperature for a device with ridge period P1=9.5  μm, ridge width WS1=7.5  μm, and depth D1=2.3  μm. (a) Before λ2 lasing. (b) Lasing at dual wavelengths. Data fittings performed using the Gaussian function are represented by solid lines.
    (a) Optical spectra measured by varying the current at room temperature (20°C). (b) Emission spectra of the device during operation when T was varied from −4°C to 60°C in increments of 4°C (measured at 1.05×Ith). The insets show the linearly fitted tuning characteristics of lasing frequency versus injection temperature. (c) The upper part, spectrum of the tuning range combined with temperature and current tuning. The insets are single-mode spectra of the λ1 and λ2 emissions at 20°C with SMSR of over 20 dB. The lower part, the absorption lines of gas molecules within the tuning range.
    Fig. 7. (a) Optical spectra measured by varying the current at room temperature (20°C). (b) Emission spectra of the device during operation when T was varied from 4°C to 60°C in increments of 4°C (measured at 1.05×Ith). The insets show the linearly fitted tuning characteristics of lasing frequency versus injection temperature. (c) The upper part, spectrum of the tuning range combined with temperature and current tuning. The insets are single-mode spectra of the λ1 and λ2 emissions at 20°C with SMSR of over 20 dB. The lower part, the absorption lines of gas molecules within the tuning range.
    Xiyu Lu, Yanjiao Guan, Pengchang Yang, Shan Niu, Yu Ma, Lijun Wang, Ning Zhuo, Jinchuan Zhang, Shenqiang Zhai, Fengmin Cheng, Shuman Liu, Fengqi Liu, Junqi Liu, "Dual-mode distributed feedback quantum cascade laser based on stacked 3D monolithic integration for on-chip multi-channel gas sensing," Photonics Res. 11, 2113 (2023)
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