• Photonics Research
  • Vol. 11, Issue 12, 2113 (2023)
Xiyu Lu1,2, Yanjiao Guan1,2, Pengchang Yang1,2, Shan Niu1,2..., Yu Ma1,2, Lijun Wang1,2, Ning Zhuo1,2, Jinchuan Zhang1,2, Shenqiang Zhai1,2, Fengmin Cheng1,2, Shuman Liu1,2, Fengqi Liu1,2 and Junqi Liu1,2,*|Show fewer author(s)
Author Affiliations
  • 1Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing Key Laboratory of Low Dimensional Semiconductor Materials and Devices, Beijing 100083, China
  • 2Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
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    DOI: 10.1364/PRJ.500047 Cite this Article Set citation alerts
    Xiyu Lu, Yanjiao Guan, Pengchang Yang, Shan Niu, Yu Ma, Lijun Wang, Ning Zhuo, Jinchuan Zhang, Shenqiang Zhai, Fengmin Cheng, Shuman Liu, Fengqi Liu, Junqi Liu, "Dual-mode distributed feedback quantum cascade laser based on stacked 3D monolithic integration for on-chip multi-channel gas sensing," Photonics Res. 11, 2113 (2023) Copy Citation Text show less

    Abstract

    To facilitate the development of on-chip integrated mid-infrared multi-channel gas sensing systems, we propose a high-power dual-mode (7.01 and 7.5 μm) distributed feedback quantum cascade laser based on stacked 3D monolithic integration. Longitudinal mode control is achieved by preparing longitudinal nested bi-periodic compound one-dimensional Bragg gratings along the direction of the cavity length in the confinement layer. Additionally, transverse coherent coupling ridges perpendicular to the cavity length direction are fabricated in the upper waveguide layer to promote the fundamental transverse mode output when all ridges are in phase. Stable dual-wavelength simultaneous emission with a side-mode suppression ratio of more than 20 dB was achieved by holographic exposure and wet etching. The entire spectral tuning range covers nearly 100 nm through joint tuning of the injection current and heat-sink temperature. High peak power and beam quality are guaranteed by the parallel coherent integration of seven-element ridge arrays. The device operates in a fundamental supermode with a single-lobed far-field pattern, and its peak output power reaches 3.36 W in pulsed mode at 20°C. This dual-mode laser chip has the potential for in-situ on-chip simultaneous detection of CH4 and C2H6 gases in leak monitoring.
    n˜=n(ω)+iκ(ω),

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    α(ω)=κ0κ(ω),κ0=2πλ0,

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    Psin(θ)=±[k+δ2π]λ,

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    Xiyu Lu, Yanjiao Guan, Pengchang Yang, Shan Niu, Yu Ma, Lijun Wang, Ning Zhuo, Jinchuan Zhang, Shenqiang Zhai, Fengmin Cheng, Shuman Liu, Fengqi Liu, Junqi Liu, "Dual-mode distributed feedback quantum cascade laser based on stacked 3D monolithic integration for on-chip multi-channel gas sensing," Photonics Res. 11, 2113 (2023)
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