Fig. 1. Infrared detectors with micro-holes on silicon substrates^[19-21]; （a） Schematic diagram of Si-Ge optoelectronic device with micro-hole array structures^[19]; （b） External quantum efficiency enhancement coefficient and responsivity in the 1 200-1 800 nm band of the Si-Ge device^[19]；（c） Schematic diagram of a silicon single-photon avalanche detector with micro-hole array structures^[20]; （d） External quantum efficiency of devices of different sizes^[20]; （e） Schematic diagram of conformal graphene/silicon nanopore detector^[21] ; （f） Photoelectric response of silicon nanopore, graphene/silicon and conformal graphene/silicon nanopore detectors^[21]

Fig. 2. (a) A schematic diagram of a silicon photodiode integrated with a micro-holes^[22]; (b) SEM images of holes of different shapes integrated in the photodiode, including square holes, hexagonal holes, cylindrical and funnel shapes^[22]; (c) Scanning electron microscope picture of the active area of the photodiode^[22]; (d) A schematic diagram of a silicon photodetector with integrated micro structures^[23]; (e) Top and cross-sectional views of the funnel-shaped and inverted pyramid-shaped light trapping structures^[23]; (f) Relationship between the external quantum efficiency and the number of nano-holes^[23]

Fig. 2. [in Chinese]

Fig. 3. Mid-wave infrared detector samples of HgCdTe with microstructures of different filling factors^[24]

Fig. 4. Structure and photoelectric characteristics of different types of nanorods near infrared photodetectors^[26-29]. (a) I-V curve of the SiNW/Au/Graphene detector and the device structure^[26]; (b) Schematic diagram of the silicon nanowire array/perovskite photodetector(cross-sectional view and 850 nm incident light time response curve under zero bias)^[27]; (c) Schematic diagram of PbSe₂/GeNcs array heterojunction photodetector(cross-sectional SEM image of germanium nanocone array and I-V curve diagram)^[28]; (d) Schematic diagram of the ZnO/MoS₂detector(SEM images and time-current response)^[29]

Fig. 5. Structures and performances of enhanced infrared detectors with different types of surface metal microstructures^[34-37]. (a) Structure diagram of the aysmmetric infrared plasma detector(SEM image and electric field intensity enhancement coefficient)^[34] ; (b) Schematic diagram of the two-color infrared detector with cross stars(SEM image and reflection curve)^[35];(c) Schematic diagram of the square-hole plasma long-wave infrared detector(SEM image and curve of absorption enhancement factor)^[36]; (d) Schematic diagram of the plasma cavity quantum well infrared detector(SEM image and absorption enhancement spectrum)^[37]

Fig. 6. Structures and performance of several types of hot-electron infrared detectors with metal meta-surface^[43-46]. (a) Structure diagram, SEM image and photoelectrical properties of local plasmon thermal electron injection photodetector^[43]; (b) Structure diagram and quantum efficiency curve of plasmon thermoelectron photodetector based on surface plasma^[44]; (c) Schematic diagram and spectral response of all-silicon thermoelectronic photodetector^[45]; (d) Structure diagram and absorption curve of a wide band thermo-electron photodetector^[46]

Fig. 7. Structures and performance of several types of 3D plasmonic cavity enhanced infrared detectors with micro-structure^[50-53]

Fig. 8. Structures and performance of plasmonic cavity enhanced 2D materials infrared detectors with micro-structure ^[54-56]. (a) Schematic diagram of plasma cavity structure and absorption curve of graphene^[54]; (b) Schematic diagram and absorption curve of hybrid grating Fabry-Perot structure integrated with graphene film^[55]; (c) Schematic diagram of gold nanostructure plasmonic cavity and absorption curve of black phosphorus^[56]

Fig. 9. Structures and performance of three kinds of heavily doped semiconducting plasma detectors^[61-63]. (a) Structures of heavily doped plasmonic detector, distribution of electrical field and curve of EQE^[61]; (b) Schematic diagram of ultra-thin enhanced absorption long-wave infrared detector(band-structure schematics and the absorption curve)^[62] ; (c) Schematic diagram of a single-cycle GMR detector （Scanning electron micrographs and detectability curves of cross-sections）^[63]

Fig. 9. [in Chinese]

Table 1. Classification and progress of micro-nano structure enhanced infrared detectors