• Laser & Optoelectronics Progress
  • Vol. 55, Issue 1, 11410 (2018)
Liu Monan1, Li Mutian2, and Sun Hongbo2、*
Author Affiliations
  • 1College of Physics, Jilin University, Changchun, Jilin 130012, China
  • 2State Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun, Jilin 130012, China
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    DOI: 10.3788/LOP55.011410 Cite this Article Set citation alerts
    Liu Monan, Li Mutian, Sun Hongbo. 3D Femtosecond Laser Nanoprinting[J]. Laser & Optoelectronics Progress, 2018, 55(1): 11410 Copy Citation Text show less
    Basics of two-photon photopolymerization (TPP)[48]. (a) Schematic of TPP fabrication; (b) achievement of sub-diffraction-limit (SDL) fabrication accuracy [the absorption probabilities of single photo absorption (SPA) and TPA are denoted by dashed and solid lines, respectively; the inset is a diffraction pattern]
    Fig. 1. Basics of two-photon photopolymerization (TPP)[48]. (a) Schematic of TPP fabrication; (b) achievement of sub-diffraction-limit (SDL) fabrication accuracy [the absorption probabilities of single photo absorption (SPA) and TPA are denoted by dashed and solid lines, respectively; the inset is a diffraction pattern]
    Schematic of 3D femtosecond laser nanoprinting system
    Fig. 2. Schematic of 3D femtosecond laser nanoprinting system
    Micro-nanostructures fabricated via 3D FsLNP. (a) Micro-bull sculpture by raster scanning[23]; (b) micro-basin developed from a bio-photoresist[49]; (c) 3D biomimetic lamellate wrinkle structure developed from a hydrogel[56]; (d) university badge pattern assembled from CdTe quantum dots[57]
    Fig. 3. Micro-nanostructures fabricated via 3D FsLNP. (a) Micro-bull sculpture by raster scanning[23]; (b) micro-basin developed from a bio-photoresist[49]; (c) 3D biomimetic lamellate wrinkle structure developed from a hydrogel[56]; (d) university badge pattern assembled from CdTe quantum dots[57]
    Schematics and SEM images of microlens arrays with different curvature units (MLADC) fabricated via 3D FsLNP. (a) Schematic of perspective view; (b) schematic of cross-section view as well as the focal plane; (c) SEM image shot from top; (d) SEM image shot from side[67]
    Fig. 4. Schematics and SEM images of microlens arrays with different curvature units (MLADC) fabricated via 3D FsLNP. (a) Schematic of perspective view; (b) schematic of cross-section view as well as the focal plane; (c) SEM image shot from top; (d) SEM image shot from side[67]
    Top-view SEM micrographs of the microlasers with different shapes fabricated via 3D FsLNP on the narrow band filter substrate[68]. (a) Circular disk; (b) circular ring; (c) spiral ring; (d) spiral ring stacked on circular ring; (e) spiral ring stacked on circular disk
    Fig. 5. Top-view SEM micrographs of the microlasers with different shapes fabricated via 3D FsLNP on the narrow band filter substrate[68]. (a) Circular disk; (b) circular ring; (c) spiral ring; (d) spiral ring stacked on circular ring; (e) spiral ring stacked on circular disk
    3D FsLNP using diversiform silk-based aqueous inks[49]. (a) Image of silk fibroin extracted from Bombyx mori silkworm cocoons in the inset; (b) image of renewable silk fibroin (RSF) aqueous mother solution (mass fraction of 3%); (c) diversiform silk-based aqueous inks [(I) RSF/MB aqueous solution, (II) RSF/Ag nanoseed aqueous solution, (III) RSF/AgNO3 aqueous solution, (IV) RSF/HAuCl4 aqueous solution]; (d) schematic
    Fig. 6. 3D FsLNP using diversiform silk-based aqueous inks[49]. (a) Image of silk fibroin extracted from Bombyx mori silkworm cocoons in the inset; (b) image of renewable silk fibroin (RSF) aqueous mother solution (mass fraction of 3%); (c) diversiform silk-based aqueous inks [(I) RSF/MB aqueous solution, (II) RSF/Ag nanoseed aqueous solution, (III) RSF/AgNO3 aqueous solution, (IV) RSF/HAuCl4 aqueous solution]; (d) schematic
    Protein-based multi-mode interference (MMI) optical micro-splitters via 3D FsLNP[88]. (a) Schematic of 3D FsLNP of protein-based MMI micro-splitters; (b) optical microscopic image of protein-based MMI micro-splitters prepared on MgF2 substrate, the scale bar is 10 μm
    Fig. 7. Protein-based multi-mode interference (MMI) optical micro-splitters via 3D FsLNP[88]. (a) Schematic of 3D FsLNP of protein-based MMI micro-splitters; (b) optical microscopic image of protein-based MMI micro-splitters prepared on MgF2 substrate, the scale bar is 10 μm
    Natural compound eye and high quality artificial compound eye via 3D FsLNP combined with the high-speed voxel-modulation laser scanning method[89]. (a) Top-view and(b) magnified SEM images of a natural compound eye showing a macrobase and hundreds of 100% filled hexagonal micro-ommatidia; (c) top-view and (d) 30°-tilted magnified SEM images of the bio-inspired artificial compound eye, the 100% fill factor of hexagonal ommatidia is comparable to t
    Fig. 8. Natural compound eye and high quality artificial compound eye via 3D FsLNP combined with the high-speed voxel-modulation laser scanning method[89]. (a) Top-view and(b) magnified SEM images of a natural compound eye showing a macrobase and hundreds of 100% filled hexagonal micro-ommatidia; (c) top-view and (d) 30°-tilted magnified SEM images of the bio-inspired artificial compound eye, the 100% fill factor of hexagonal ommatidia is comparable to t
    TechniqueMaterialPrecisionScaleMechanism
    3D FsLNPPolymers, metal, metal oxide, silk fibroin, etc.~10 nmμmTwo-photon photopolymerization
    SLM[50-53]Plastic fine powder, ceramic powder>10 μmcmSelective powder sintering
    LENS[54-55]Metal powder>10 μmmmSelective laser sintering &laser cladding
    Table 1. Comparison between 3D FsLNP and 3D laser printing
    Liu Monan, Li Mutian, Sun Hongbo. 3D Femtosecond Laser Nanoprinting[J]. Laser & Optoelectronics Progress, 2018, 55(1): 11410
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