• Acta Optica Sinica
  • Vol. 40, Issue 19, 1912001 (2020)
Cong Ji1、***, Zixuan Wang2, Gang Yang1, Jing Wang1, Liming Wu1, Helin Wang1, Bin Wu1, Bing Cheng1, Chunlin Chen1, Gewen Sun1, Shaohua Chang1, Ning Zhang2, Xiaolong Wang1、*, and Qiang Lin1、**
Author Affiliations
  • 1Key Laboratory of Quantum Precision Measurement of Zhejiang Province, College of Science, Zhejiang University of Technology, Hangzhou, Zhejiang 310023, China
  • 2Research Center for Quantum Sensing, Zhejiang Lab, Hangzhou, Zhejiang 310000, China
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    DOI: 10.3788/AOS202040.1912001 Cite this Article Set citation alerts
    Cong Ji, Zixuan Wang, Gang Yang, Jing Wang, Liming Wu, Helin Wang, Bin Wu, Bing Cheng, Chunlin Chen, Gewen Sun, Shaohua Chang, Ning Zhang, Xiaolong Wang, Qiang Lin. Precise Tilt Platform Using Position Sensitive Detector and Control Method for Tilt Angle[J]. Acta Optica Sinica, 2020, 40(19): 1912001 Copy Citation Text show less
    References

    [1] Xu G H, He W, Fu J Z et al. Precision tilting platform used for static calibration of accelerometers[J]. Chinese Journal of Scientific Instrument, 37, 2452-2458(2016).

    [2] He J, Xia H, Yan J Y et al[J]. A nano-positioning stage control system design Digital Technology & Application, 2019, 171-172.

    [3] Ma L, Yang B, Tian Y Z et al. Design of 3-DOF planar nano-positioning platform with 3-PRR structure[J]. Optics and Precision Engineering, 25, 1866-1873(2017).

    [4] Zhu W B, Zhu S A, Ye S L et al. Research on ultra-precision positioning platform based on phase tracking[J]. Chinese Journal of Scientific Instrument, 33, 2301-2306(2012).

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    [11] Tian Y, Liu C, Liu X et al. Design, modelling and characterization of a 2-DOF precision positioning platform[J]. Transactions of the Institute of Measurement and Control, 37, 396-405(2015).

    [12] Li J P, Zhao H W, Qu X T et al. Development of a compact 2-DOF precision piezoelectric positioning platform based on inchworm principle[J]. Sensors and Actuators A: Physical, 222, 87-95(2015).

    [13] Zhu M C, Luo X P[J]. Wang Y P. The error analysis, compensation of two-dimensional precision positioning platform. Applied Mechanics, Materials, 268/269/270, 1380-1384(2012).

    [14] Wang Z X, Ji C, Wang J et al. Precision displacement measurement with nanometer resolution based on transmissive laser air-wedge interference[J]. Chinese Journal of Lasers, 46, 0904006(2019).

    [15] Hu Y, Zhu Y Y. Design of a high voltage piezoelectric ceramic driving power supply[J]. Piezoelectrics & Acoustooptics, 42, 71-76(2020).

    Cong Ji, Zixuan Wang, Gang Yang, Jing Wang, Liming Wu, Helin Wang, Bin Wu, Bing Cheng, Chunlin Chen, Gewen Sun, Shaohua Chang, Ning Zhang, Xiaolong Wang, Qiang Lin. Precise Tilt Platform Using Position Sensitive Detector and Control Method for Tilt Angle[J]. Acta Optica Sinica, 2020, 40(19): 1912001
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