Cong Ji, Zixuan Wang, Gang Yang, Jing Wang, Liming Wu, Helin Wang, Bin Wu, Bing Cheng, Chunlin Chen, Gewen Sun, Shaohua Chang, Ning Zhang, Xiaolong Wang, Qiang Lin. Precise Tilt Platform Using Position Sensitive Detector and Control Method for Tilt Angle[J]. Acta Optica Sinica, 2020, 40(19): 1912001
- Acta Optica Sinica
- Vol. 40, Issue 19, 1912001 (2020)
Fig. 1. Precise tilt platform. (a) Structural diagram of platform, where (1) is transmission part, and (2) is cross-sectional view; (b) physical picture
Fig. 2. Diagrams of platform motion models. (a) Spatial motion state of platform; (b) relationship between PZT displacement and platform posture
Fig. 3. Schematic diagram of displacement measurement
Fig. 4. Schematic diagram of precise tilt platform control system
Fig. 5. Diagram of control system using precise tilt platform
Fig. 6. Comparison of open-loop control and closed-loop control
Fig. 7. Comparison of measurement results between PSD detection device and inclinometer
Fig. 8. Resolution statistics of closed-loop control
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