Optical Emission Analyses of N2/TMG ECR Plasma for Deposition of GaN Film

FU Si-lie; WANG Chun-an; CHEN Jun-fang

doi:10.3964/j.issn.1000-0593(2013)04-1108-04

Journals >Spectroscopy and Spectral Analysis >Volume 33 >Issue 4 >Page 1108 > Article

Spectroscopy and Spectral Analysis
Vol. 33, Issue 4, 1108 (2013)

Optical Emission Analyses of N2/TMG ECR Plasma for Deposition of GaN Film

FU Si-lie^1、*, WANG Chun-an², and CHEN Jun-fang¹

Author Affiliations

¹[in Chinese]

²[in Chinese]

show less

DOI: 10.3964/j.issn.1000-0593(2013)04-1108-04 Cite this Article

FU Si-lie, WANG Chun-an, CHEN Jun-fang. Optical Emission Analyses of N2/TMG ECR Plasma for Deposition of GaN Film[J]. Spectroscopy and Spectral Analysis, 2013, 33(4): 1108 Copy Citation Text

show less

References

[1] Li E, Cui Z, Dai Y, et al. Appl. Ssurf. Sci., 2011, 257: 10850.

[2] Fu S L, Chen J F, Zhang H B, et al. J. Cryst. Growth, 2009, 311: 3325.

[4] Fu S L, Chen J F, Hu S J, et al. Plasma Sources Sci. Technol., 2006, 15: 187.

[6] Vinogradov I P. Plasma Sources Sci. Technol., 1999, 8: 299.

[7] Jordan D C, Tsong I S T, Smith D J, et al. Appl. Phys. Lett., 2000, 77: 3030.

[8] Pu Y K, Ren Y F, Yang S Z, et al. Surf. Coat. Technol., 2000, 131: 470.

[9] Koukitu A, Seki H. Appl. Phys. Lett., 1980, 49: 325.

[10] Chiba Y, Shimizu Y, Tominari T, et al. J. Cryst. Growth, 1998, 189/190: 317.

[11] Nicolazo F, Goullet A, Granier, et al. Surf. Coat. Technol., 1998, 98: 1578.

[12] Thomas L, Maille L, Badie J M, et al. Surf. Coat. Technol., 2001, 142-144: 314.

[13] Zambrano G, Riascos I, Prieto P, et al. Surf. Coat. Technol., 2003, 172: 144.

FU Si-lie, WANG Chun-an, CHEN Jun-fang. Optical Emission Analyses of N2/TMG ECR Plasma for Deposition of GaN Film[J]. Spectroscopy and Spectral Analysis, 2013, 33(4): 1108

Download Citation

Tools

Save the article for my favorites

Paper Information