Author Affiliations
1Department of Physics, Harbin Institute of Technology, Harbin, Heilongjiang 150001, China2Department of Optoelectronics Science, Harbin Institute of Technology at Weihai, Weihai, Shandong 264209, Chinashow less
Fig. 1. SEM images of self-organized nano-gratings in the transversal cross section of written lines
[42] Fig. 2. SEM images of various designed suspended structures (line, disk, helix, and pentagon stuctures)
[43] Fig. 3. Complicated 3D structures
[44]. (a) Three-level steps; (b) the word “LASER” on a rectangular step; (c) rectangular pyramid; (d) concave micro lens array
Fig. 4. Bubbles induced at different FDs
[9] Fig. 5. Cross section of optical waveguide fabricated in Nd∶KGW
[49]. A is the waveguide area, B is the filament induced by the femtosecond laser, and C is the unprocessed area (bulk) far away from the filament
Fig. 6. Femtosecond laser inscription of optical waveguide in SMF-NCF-SMF
[50] Fig. 7. Experimental setup for fabrication of ULPFBGs
[51] Fig. 8. Fabricated grating structure in the core of fiber
[51] Fig. 9. Microscope images of cross section of sapphire fiber and inscribed fourth-order SFBG
[38]. (a) Microscope image of cross section of sapphire fiber with diameter of 60 μm; microscope images of inscribed fourth-order SFBG: (b) top view and (c) side view
Fig. 10. Schematic diagram of line-by-line scanning method
[6] Fig. 11. Photomicrographs of fabricated SFBG
[6]. (a) Top view; (b) side view
Fig. 12. Four in-fiber mirrors
[52] Fig. 13. Same micro-structures made by different scanning methods
[55]. (a) Raster mode; (b) vector mode
Fig. 14. Polymer waveguide integrated in the fibre micro-cavity
[32]. (a) Top view of fabricated polymer waveguide integrated in fiber micro-cavity; (b) polymer waveguide with length of 60 μm; (c) polymer waveguide with length of 80 μm
Fig. 15. Fabrication process diagram of liquid polymer filled-cavity FP fiber sensing structure
[33] Fig. 16. Optical microscope images of polymerized grating
[58]. (a) Before rinsing; (b) after rinsing
Fig. 17. Microstructure of spiral channels in glass
[8]. (a) Diagram of spiral-shaped microchannel; (b) side view of etched spiral-shaped microchannel by HF acid inside glass; (c) side view of spiral-shaped microchannel after baking of etched sample at 600 ℃ for 4 h; (d) cross-section of post baked microchannel; (e) cross-section of channel at the opening area
Fig. 18. Side view of blue solution flowing through spiral-microchannel
[8] Fig. 19. Helical microchannel in quartz glass
[71]. (a) Fabricated helical microchannel with block at end of channel; (b)(c) fabricated helical micro channels with length of 1 mm
Fig. 20. Structures of micro diverter and micro mixer
[72]. (a) Empty micro mixer; (b) micro mixer filled with water; (c) empty micro diverter; (d) micro diverter filled with water
Fig. 21. Three-dimensional microfluidic chip
[73]. (a) Diagram of microfluidic chip; (b) fabricated microfluidic chip in silica glass
Fig. 22. Fabricate micro channels in optic fibers using femtosecond laser-induced water break down
[74] Fig. 23. Structures of liquid refractive index sensor with three micro channels across fiber core
[72]. (a) Front view; (b) top view; (c) opening of microchannel on the top of fiber; (d) opening of microchannel on the bottom of fiber
Fig. 24. H-type humidity sensor in SMF
[76]. (a) Top view of fabricated two vertical micro channels rightly across fiber core; (b) side view of fabricated two vertical micro channels rightly across fiber core in SMF in the first step; (c) top view of fabricated H-type microchannel in SMF; (d) side view of fabricated H-type microchannel in SMF
Fig. 25. MZ interferometer microcavity in SMS fiber structure by femtosecond laser-induced water breakdown
[78]. (a) A section of multi mode fiber was spliced between two sections of the SMF; (b) structure of SMS; (c) setup for fabricating microcavity in SMS by femtosecond laser-induced water breakdown; (d) scanning track of laser focus; (e) fabricated microcavity in SMS