• Acta Optica Sinica
  • Vol. 44, Issue 15, 1513032 (2024)
Xinhai Zou1, Junfeng Zhu1, Chao Jing1, Zhihui Li1,2..., Naidi Cui2, Junbo Feng2, Yali Zhang1, Zhiyao Zhang1, Yong Liu1, Shangjian Zhang1,* and Ninghua Zhu3|Show fewer author(s)
Author Affiliations
  • 1School of Optoelectronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 611731, Sichuan , China
  • 2United Microelectronics Center, Chongqing 400031, China
  • 3Xiongan Institute of Innovation, Baoding 071899, Hebei , China
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    DOI: 10.3788/AOS240856 Cite this Article Set citation alerts
    Xinhai Zou, Junfeng Zhu, Chao Jing, Zhihui Li, Naidi Cui, Junbo Feng, Yali Zhang, Zhiyao Zhang, Yong Liu, Shangjian Zhang, Ninghua Zhu. On-Wafer and In-Line Measurement of Optoelectronic Integrated Chips Based on Photonic Sampling (Invited)[J]. Acta Optica Sinica, 2024, 44(15): 1513032 Copy Citation Text show less
    Schematic diagram of high-speed optoelectronic chip measurement. (a) Electro-optical modulator chip measurement; (b) photodetector chip measurement
    Fig. 1. Schematic diagram of high-speed optoelectronic chip measurement. (a) Electro-optical modulator chip measurement; (b) photodetector chip measurement
    Signal flow graphs of two-port network of optoelectronic chip. (a) Electro-optical modulator chip; (b) photodetector chip
    Fig. 2. Signal flow graphs of two-port network of optoelectronic chip. (a) Electro-optical modulator chip; (b) photodetector chip
    Enlarged image of wafer and chip. (a) Image of wafer under test; (b) single wafer chip; (c) electro-optical modulator chip; (d) photodetector chip
    Fig. 3. Enlarged image of wafer and chip. (a) Image of wafer under test; (b) single wafer chip; (c) electro-optical modulator chip; (d) photodetector chip
    Typical electrical spectra and measured results of photonic up-conversion and down-conversion sampling. (a) Typical electrical spectrm of photonic down-conversion sampling; (b) typical electrical spectrm of photonic up-conversion sampling; (c) measured results of photonic up-conversion and down-conversion sampling components
    Fig. 4. Typical electrical spectra and measured results of photonic up-conversion and down-conversion sampling. (a) Typical electrical spectrm of photonic down-conversion sampling; (b) typical electrical spectrm of photonic up-conversion sampling; (c) measured results of photonic up-conversion and down-conversion sampling components
    Measurement results of uneven response of optical frequency comb. (a) Autocorrelation function curves of optical pulse; (b) calculation results of uneven response
    Fig. 5. Measurement results of uneven response of optical frequency comb. (a) Autocorrelation function curves of optical pulse; (b) calculation results of uneven response
    Comparison of results before and after deducting the uneven response of optical frequency comb
    Fig. 6. Comparison of results before and after deducting the uneven response of optical frequency comb
    Obtained response parameters. (a) S-parameter of AN-A; (b) S-parameter of AN-B; (c) reflection coefficient of the electro-optical chip to be measured; (d) system parameters of microwave network analyzer
    Fig. 7. Obtained response parameters. (a) S-parameter of AN-A; (b) S-parameter of AN-B; (c) reflection coefficient of the electro-optical chip to be measured; (d) system parameters of microwave network analyzer
    Degradation responses of AN-A and AN-B
    Fig. 8. Degradation responses of AN-A and AN-B
    Intrinsic frequency responses of electro-optical modulator chip
    Fig. 9. Intrinsic frequency responses of electro-optical modulator chip
    Intrinsic frequency responses of photodetector chip
    Fig. 10. Intrinsic frequency responses of photodetector chip
    Uneven response pn/p1 of optical frequency comb
    Fig. 11. Uneven response pn/p1 of optical frequency comb
    Xinhai Zou, Junfeng Zhu, Chao Jing, Zhihui Li, Naidi Cui, Junbo Feng, Yali Zhang, Zhiyao Zhang, Yong Liu, Shangjian Zhang, Ninghua Zhu. On-Wafer and In-Line Measurement of Optoelectronic Integrated Chips Based on Photonic Sampling (Invited)[J]. Acta Optica Sinica, 2024, 44(15): 1513032
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