Fanfan Shen, Ailing Tian, Dasen Wang, Bingcai Liu, Xueliang Zhu, Hongjun Wang. Correction of Eccentricity Error in Absolute Flat Surface Testing by Shift-Rotation Method[J]. Laser & Optoelectronics Progress, 2021, 58(19): 1912001
- Laser & Optoelectronics Progress
- Vol. 58, Issue 19, 1912001 (2021)
Fig. 1. Measurement process of shift-rotationn absolute measurement method
Fig. 2. Position relationship between tested mirror and reference mirror. (a) Initial position; (b) rotation 90°; (c) rotate 180°
Fig. 3. Surface shape distribution of initial plane element. (a) A surface shape; (b) B surface shape
Fig. 4. Relationship between PV and RMS values of residual surface shape and different parameters. (a) Eccentricity error; (b) rotation angle
Fig. 5. Registration mode. (a) Benchmark image; (b) image to be registered; (c) registration route
Fig. 6. Surface shape distribution before registration. (a)
Fig. 7. Surface shape distribution after registration (a)
Fig. 8. Initial surface distribution of different components. (a) C surface shape; (b) D surface shape; (c) E surface shape
|
Table 1. Error correction results of different surface shapes
Set citation alerts for the article
Please enter your email address
© Copyright 2018-2021 | Chinese Laser Press. All Rights Reserved 沪ICP备15018463号-20