[4] LI M W, LIU Q H, WU Q N, et al. Broadband radio frequency MEMS series contact switch with low insertion loss ［J］. Microsyst Technol, 2018, 25(5): 1619-1625.
[6] NING X J, PEREZ T, PIROUZ P. Indentation induced dislocations and microtwins GaSb and GaAs ［J］. Philosoph Magaz A, 1995, 72(4): 837-859.
[9] CHU P, WU K. Balanced dual mode SIW filter ［J］. Elec Lett, 2019, 55(4): 208-210.
[10] XU J, WU W, WEI G. Compact multi-band bandpass filters with mixed electric and magnetic coupling using multiple-mode resonator ［J］. IEEE Trans Microw Theo Techni, 2015, 63(12): 3909-3919.
[12] HUANG C, HE S, SHI W, et al. Design of broadband high-efficiency power amplifiers based on the hybrid continuous modes with phase shift parameter［J］. IEEE Microw Wirel Compon Lett, 2018, 28(2): 159-161.
[18] DAI Y S, YAO Y F, LI B S, et al. Design and implementation of an LTCC filter with high stopband rejection ［C］ // IEEE Int Symp Radio Freq Integr Technol, 2009: 371-374.
[20] LEFBVRE A, ANDROUSSI Y, VANDERSCHAEVE G. A TEM investigation of the dislocation rosettes around Vickers indentotions in GaAs ［J］. Phys Stat Solidi A, 1987, 99(2): 405-412.
