• Infrared and Laser Engineering
  • Vol. 48, Issue 2, 217001 (2019)
Li Jiakun1、*, Feng Qibo1, Bao Chuanchen1, Yang Jing1, and Zhao Bintao2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: 10.3788/irla201948.0217001 Cite this Article
    Li Jiakun, Feng Qibo, Bao Chuanchen, Yang Jing, Zhao Bintao. Measurement method and error analysis for angular positioning error of rotary axis[J]. Infrared and Laser Engineering, 2019, 48(2): 217001 Copy Citation Text show less
    References

    [1] Yang Jing, Feng Qibo, Li Jiakun. Reviewon multi-degree-of-freedom motion error measurement methods for rotary-axis laser[J]. Laser & Optoelectronics Progress, 2016, 53: 090003. (in Chinese)

    [2] Zhu Fan, Tan Jiubin, Cui Jiwen. Common-path design criteria for laser datum based measurement of small angle deviations and laser auto collimation method in compliance with the criteria with high accuracy and stability [J]. Optics Express, 2013, 21(9): 11391-11403.

    [3] Shimizu Y, Tan S L, Murata D, et al. Ultra-sensitive angle sensor based on laser autocollimation for measurement of stage tilt motions [J]. Optics Express, 2016, 24(3): 2788-2805.

    [4] Hsieh Mengchang, Lin Jiunyou, Chang Chiaou. Using a hexagonal mirror for varying light intensity in the measurement of small-angle variation [J]. Sensors, 2016, 16(8): 16081301.

    [5] Lin J Y, Liao Y C. Small-angle measurement with highly sensitive total-internal-reflection heterodyne interferometer [J]. Applied Optics, 2014, 53(9): 1903-1908.

    [6] Hsieh Hunglin, Lee Juyi, Chen Linyu, et al. Development of an angular displacement measurement technique through birefringence heterodyne interferometry [J]. Optics Express, 2016, 24(7): 6802-6813.

    [7] Pi Shiwei, Liu Qiang, Sun Pengpeng. Geometric error detection for rotary feed drive based on laser interferometer [J]. Chinese Journal of Scientific Instrument, 2017, 38(10): 2484-2491. (in Chinese)

    [8] He Zhengya, Fu Jianzhong, Zhang Liangchi, et al. A new error measurement method to identify all six error parameters of a rotational axis of a machine tool [J]. International Journal of Machine Tools & Manufacture, 2015, 88(1): 1-8.

    [9] Yang Xingang, Huang Yumei, Shi Wenhao, et al. Development on a measuring system for circular movement errors of rotary feed axis[J]. Mechanical Science and Technology for Aerospace Engineering, 2010, 29(3): 369-372.

    [10] Wang Tao, Zhao Jianke, Tian Liude, et al. Influence of parallelism between photoelectric shaft encoder axis and polyhedron one on the rotation angle error [J]. Infrared and Laser Engineering, 2018, 47(2): 0217001. (in Chinese)

    Li Jiakun, Feng Qibo, Bao Chuanchen, Yang Jing, Zhao Bintao. Measurement method and error analysis for angular positioning error of rotary axis[J]. Infrared and Laser Engineering, 2019, 48(2): 217001
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