Author Affiliations
1Key Laboratory of Opto-electronic Information Technical Science of Ministry of Education and Key Laboratory of Integrated Opto-electronic Technologies and Devices in Tianjin, School of Precision Instruments and Opto-electronics Engineering, Tianjin University, Tianjin 300072, China2School of Computer and Electrical Engineering, Shiraz University, Shiraz, Fars, Iran3School of Electronic Engineering, Tianjin University of Technology and Education, Tianjin 300222, China4Department of Electrical Engineering, University of Southern California, Los Angeles, California 90089, USA5College of Optics and Photonics, CREOL and FPCE, University of Central Florida, Orlando, Florida 32816, USA6Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, USAshow less
Fig. 1. Scheme for obtaining dispersion profile with more ZDWs. (a) The dispersion profile with another dip can introduce two more ZDWs. (b) The waveguide structure can generate the dispersion curve in (a), with one more slot layer added. (c) A slab beneath the waveguide core is introduced so that the guided mode extends to the slab more at a longer wavelength. (d) The proposed waveguide in this work.
Fig. 2. Dispersion profiles of the guided mode over a wideband (a) for WG1 and (b) for WG2. Details of the dispersion are shown in the insets, individually.
Fig. 3. Mode evolution in this waveguide. (a) Optical field distributions of the quasi-fundamental-TM mode in WG1 at 4, 5, 6, 7, and 8 μm, respectively. (b) Normalized optical field overlaps of a fixed mode located at 6 μm with other modes at 4, 5, 7, and 8 μm.
Fig. 4. Dispersion profiles for WG2 with different structural parameters changed around the optimal values. (a) Different W, (b) different H1, (c) different H2, (d) different H3, (e) different H4, and (f) different H5.
Fig. 5. Dispersion profiles of the waveguides with the six structural parameters randomly changed within a range of ±2.5% for 10 times to mimic the influence of fabrication errors (a) for WG1 and (b) for WG2.
Fig. 6. Suggested waveguide fabrication process. (a) Thermal evaporation of GeSbS. (b) Spin-coating of photoresist. (c) UV exposure through photomask. (d) Photoresist development. (e) Thermal evaporation of GeSbSe, GeSbS, and GeSbSe. (f) Photoresist lift-off. (g) Thermal evaporation of GeSbS.
Year | Material | ZDWs | Dispersion [ps/(nm·km)] | (nm) | (nm) | Flatness () | 2011 [14] | a | 4 | | | 535 | 25.48 | 2012 [15] | | 4 | | | 667 | 15.88 | 2012 [18] | −nc | 4 | | | 1098 | 23.87 | 2012 [19] | | 4 | | | 1035 | 172.50 | 2013 [21] | −nc | 4 | | | 845 | 31.30 | 2015 [22] | | 4 | | | 682 | 341.00 | 2016 [24] | | 4 | | | 800 | 29.40 | 2016 [24] | | 4 | | | 1630 | 156.73 | 2016 [39] | | 2 | | | 5000 | 357.14 | 2017 [40] | | 2 | | | 4080 | 69.15 | 2018 [5] | | 4 | | | 6500 | 135.42 | 2018 [33] | | 2 | | | 3200 | 168.42 | This work | | 5 | | | 4000 | 8000.00 | | | 6 | | | 3000 | 344.87 |
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Table 1. Comparison of Dispersion-Flattened Waveguides in Recent Works
| 1 | 2 | 3 | 4 | 5 | 6 | 7 | 8 | 9 | 10 | | 2174 | 2185 | 2260 | 2184 | 2239 | 2087 | 2180 | 2155 | 2113 | 2228 | | 727 | 728 | 717 | 723 | 711 | 735 | 695 | 728 | 704 | 713 | | 469 | 453 | 436 | 440 | 448 | 459 | 435 | 423 | 434 | 454 | | 2531 | 2521 | 2510 | 2550 | 2455 | 2647 | 2618 | 2583 | 2580 | 2533 | | 724 | 720 | 696 | 740 | 726 | 714 | 720 | 715 | 690 | 715 | | 2799 | 2720 | 2681 | 2822 | 2714 | 2689 | 2709 | 2672 | 2653 | 2902 |
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Table 2. Values of the Six Structural Parameters Randomly Changed within a Range of for 10 Times for WG1 (unit: nm)
| 1 | 2 | 3 | 4 | 5 | 6 | 7 | 8 | 9 | 10 | | 889 | 849 | 870 | 869 | 860 | 859 | 880 | 895 | 864 | 870 | | 248 | 247 | 247 | 249 | 245 | 244 | 249 | 246 | 240 | 242 | | 49.7 | 49.1 | 48.1 | 48.9 | 49.4 | 48.3 | 48.5 | 51.2 | 50.2 | 49.5 | | 626 | 638 | 653 | 664 | 636 | 647 | 626 | 646 | 650 | 638 | | 850 | 861 | 896 | 871 | 845 | 853 | 847 | 875 | 850 | 856 | | 578 | 570 | 591 | 589 | 568 | 588 | 581 | 581 | 573 | 579 |
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Table 3. Values of the Six Structural Parameters Randomly Changed within a Range of for 10 Times for WG2 (unit: nm)