DUAN Liang-fei, YANG Wen, ZHANG Li-yuan, LI Xue-ming, CHEN Xiao-bo, YANG Pei-zhi. Study on the Properties of the Pc-Si Films Prepared by Magnetron Co-Sputtering at Low Temperature[J]. Spectroscopy and Spectral Analysis, 2016, 36(3): 635
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