Optical Properties of SiNx Films Prepared by Microwave ECR-CVD

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Journals >Acta Optica Sinica >Volume 17 >Issue 4 >Page 489 > Article

Acta Optica Sinica
Vol. 17, Issue 4, 489 (1997)

Optical Properties of SiN_x Films Prepared by Microwave ECR-CVD

[in Chinese]¹, [in Chinese]¹, [in Chinese]², [in Chinese]¹, [in Chinese]¹, and [in Chinese]¹

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¹[in Chinese]

²[in Chinese]

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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Optical Properties of SiN_x Films Prepared by Microwave ECR-CVD[J]. Acta Optica Sinica, 1997, 17(4): 489 Copy Citation Text

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Abstract

The optical properties of SiN x films prepared by microwave ECR CVD have been investigated.The wide transmission spectrum and high transmissivity of SiN x films are obtained. The effects of microwave power and substrate temperature on transmission spectra, refractive index, optical band gap are analysed.

Keywords

microwave electron cyclotron resonance-chemical v optical property SiNx film

[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Optical Properties of SiN_x Films Prepared by Microwave ECR-CVD[J]. Acta Optica Sinica, 1997, 17(4): 489

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