Acceptable Error of Etching Depth in Ion Beam Etching Microlens

[in Chinese]; [in Chinese]; [in Chinese]

Journals >Acta Optica Sinica >Volume 19 >Issue 1 >Page 113 > Article

Acta Optica Sinica
Vol. 19, Issue 1, 113 (1999)

Acceptable Error of Etching Depth in Ion Beam Etching Microlens

[in Chinese]¹, [in Chinese]², and [in Chinese]²

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¹[in Chinese]

²[in Chinese]

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[in Chinese], [in Chinese], [in Chinese]. Acceptable Error of Etching Depth in Ion Beam Etching Microlens[J]. Acta Optica Sinica, 1999, 19(1): 113 Copy Citation Text

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[in Chinese], [in Chinese], [in Chinese]. Acceptable Error of Etching Depth in Ion Beam Etching Microlens[J]. Acta Optica Sinica, 1999, 19(1): 113

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