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    Journals >Acta Optica Sinica >Volume 31 >Issue 5 >Page 531001 > Article
    • Acta Optica Sinica
    • Vol. 31, Issue 5, 531001 (2011)
    Influence of Substrate Temperature on Properties of Aluminum-Doped Zinc Oxide Films Prepared by DC Magnetron Sputtering
    Yang Changhu1、2、*, Ma Zhongquan1, and Yuan Jianhui2
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    DOI: 10.3788/aos201131.0531001 Cite this Article Set citation alerts
    Yang Changhu, Ma Zhongquan, Yuan Jianhui. Influence of Substrate Temperature on Properties of Aluminum-Doped Zinc Oxide Films Prepared by DC Magnetron Sputtering[J]. Acta Optica Sinica, 2011, 31(5): 531001 Copy Citation Text show less
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    Yang Changhu, Ma Zhongquan, Yuan Jianhui. Influence of Substrate Temperature on Properties of Aluminum-Doped Zinc Oxide Films Prepared by DC Magnetron Sputtering[J]. Acta Optica Sinica, 2011, 31(5): 531001
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