Transparent and conductive c-axis oriented aluminum-doped zinc oxide (AZO) films have been prepared on glass substrate by DC magnetron sputtering processing. For this purpose, a sintered ceramic disc of ZnO mixed with Al2O3 is used as the target. The microstructure of AZO ceramic target is characterized by micro-Raman spectroscopy. The structural, optical and electrical properties of the films are characterized by scanning electron microscope (SEM), X-ray diffraction (XRD), UV-visible spectrophotometer and four-probe tester respectively. As the substrate temperature increases, the results show that grain size of the AZO films gradually increases, the films have a strong c-axis orientation and the crystallization of films becomes better. The absorption edge has a blue shift with increasing deposition temperature. The refractive index of the films decreases but films thickness and optical band gap increase with increasing deposition temperature. Resistivity of AZO films decreases with increasing deposition temperature but resistivity approaches stable after substrate temperature reaches 350 ℃.