Fig. 1. (Color online) (a) Architecture of the proposed 2 × 2 HMPSA (The calculated mode patterns of the TE₀, TE₁, TM₀ and TM₁ modes are intensity profiles). Structures of (b) MMUX and (c) 2 × 2 high-speed MZI switch. (d) Cross-sectional view of the PN phase shifter. (MMUX-A: auxiliary mode multiplexer; MDEMUX-A: auxiliary mode de-multiplexer.)

Fig. 2. (Color online) (a) Micrograph of a silicon chip including a HMPSA. Magnified micrographs of (b) a PBS and a MMUX, (c) a PR, (d) a MZI switch and (e) waveguide crossings.

Fig. 3. (Color online) Results of measured inter-modal crosstalk.

Fig. 4. (Color online) Results of measured intra-modal crosstalk.

Fig. 5. (Color online) Measured dynamic response of the switch. Yellow and blue curves represent the applied square-wave voltage signal and measured signal dynamic switching, respectively. The dotted lines donate the 10% and 90% of the peak voltage.

Table 1. Measured insertion losses of the building blocks.