[1] Fan S W, Zhou Q H, Li H. Research of optimization design of groove diffraction grating profile parameters[J]. Acta Optica Sinica, 30, 3133-3139(2010).
[2] Yu M, Gao J S, Zhang J et al. Suppression of the stray light of 2-dimensional gratings combined with an array of periodic slit[J]. Acta Physica Sinica, 62, 204208(2013).
[3] Zhou C G, Wang Y N, Chen Y H et al. Alignment measurement of two-dimensional zero-reference marks[J]. Precision Engineering, 30, 238-241(2006).
[4] Zhang Z Q, Zhou L, Guo Z C et al. Structure design and simulation analysis based on electrically driven nanograting[J]. Acta Optica Sinica, 41, 2105001(2021).
[5] Albero J, García-Martínez P, Luis Martínez J et al. Second order diffractive optical elements in a spatial light modulator with large phase dynamic range[J]. Optics and Lasers in Engineering, 51, 111-115(2013).
[6] Moreno I, Gutierrez B K, Sánchez-López M M et al. Diffraction efficiency of stepped gratings using high phase-modulation spatial light modulators[J]. Optics and Lasers in Engineering, 126, 105910(2020).
[7] Yang S Y, Yang H, Qin L et al. Measuring the relationship between grayscale and phase retardation of LCoS based on binary optics[J]. SID Symposium Digest of Technical Papers, 51, 140-143(2020).
[8] Cheng G L, Cong L, Chen A X. Two-dimensional electromagnetically induced grating via gain and phase modulation in a two-level system[J]. Journal of Physics B: Atomic, Molecular and Optical Physics, 49, 085501(2016).
[9] Zhang X B, Qiu Y S, Chen H X et al. Design of fused-silica transmission gratings for orthogonal polarizing beam combiners[J]. Optics Communications, 333, 75-79(2014).
[10] Srivastava A K, Hu W, Chigrinov V G et al. Fast switchable grating based on orthogonal photo alignments of ferroelectric liquid crystals[J]. Applied Physics Letters, 101, 031112(2012).
[11] Li F Q, Chen W J. Phase error analysis and correction for phase shifting profilometry using crossed grating[J]. Acta Optica Sinica, 41, 1412002(2021).
[12] Lin C B, Yan S H, Du Z G et al. High-efficiency gold-coated cross-grating for heterodyne grating interferometer with improved signal contrast and optical subdivision[J]. Optics Communications, 339, 86-93(2015).
[13] Hu W, Kumar Srivastava A, Lin X W et al. Polarization independent liquid crystal gratings based on orthogonal photoalignments[J]. Applied Physics Letters, 100, 111116(2012).
[14] Fan S W. The vector theory analysis of binary gratings diffraction characteristics[J]. Optics and Precision Engineering, 7, 30-36(1999).
[15] Zhu J C, Zhou J K, Shen W M. Polarisation-independent diffraction grating based on dielectric metasurface[J]. Electronics Letters, 55, 756-759(2019).
[16] Yuan X, Wang J J, Jin H Y. Analysis of spatial spectrum distribution of a cross-grating[J]. Physical Experiment of College, 24, 43-44, 48(2011).
[17] Xia H J, Fei Y T, Wang Z Y. The 2-D grating′s spectrum analysis and application in precise measurement[J]. Acta Photonica Sinica, 36, 726-729(2007).
[18] Chen L, Huang L H, Li X Y. A high-precision centroid detecting method based on two-dimension orthogonal gratings[J]. Opto-Electronic Engineering, 44, 912-918, 933(2017).
[19] Zhai Z S, Cao W Z, Gao T et al. Beam shaping with high energy utilization and uniformity using gradient orthogonal gratings[J]. Applied Optics, 60, 5104-5109(2021).
[20] He Z H, Sui X M, Cao L C et al. Optimization of quantization value for spatial light modulators based on parameter space traversal[J]. Chinese Journal of Lasers, 48, 1209002(2021).
[21] Ronzitti E, Guillon M, de Sars V et al. LCoS nematic SLM characterization and modeling for diffraction efficiency optimization, zero and ghost orders suppression[J]. Optics Express, 20, 17843-17855(2012).
[22] Arrizón V, Carreón E, Testorf M. Implementation of Fourier array illuminators using pixelated SLM: efficiency limitations[J]. Optics Communications, 160, 207-213(1999).
[23] Khonina S N, Porfirev A P, Ustinov A V. Diffraction patterns with mth order symmetry generated by sectional spiral phase plates[J]. Journal of Optics, 17, 125607(2015).
