Fig. 1. Block diagram of the OSSB modulator.

Fig. 2. Microphotograph of the integrated Si OSSB modulator.

Fig. 3. (a) Structure and (b) cross section and the electrical model of the Si MRM.

Fig. 4. Measured and simulated electrical S11 (a) magnitude and (b) phase of the Si MRM. For simulation, extracted values shown in Table 1 are used.

Fig. 5. Measured optical transmission spectra of the Si MRM at different bias voltages.

Fig. 6. (a) Simulated modulation frequency response and (b) measured and simulated optical spectrum for Si MRM modulated at 30 GHz with D=90  pm.

Fig. 7. Schematic of the QHC.

Fig. 8. Simulated (a) magnitude of and (b) phase difference between I/Q output signals for the QHC with Si MRM loads.

Fig. 9. Measured and simulated for (a) magnitude of and (b) phase difference between QHC I/Q output signals with 50 Ω loads.

Fig. 10. Measured optical transmission spectra of the PDRM (a) without temperature control and zero bias voltage and (b) with temperature control at three different bias voltages. (c) Measured OSSB modulator output optical spectrum when modulated with 30 GHz, 2 Vpp sinusoidal signals at D=90  pm and 1 V bias voltage.

Fig. 11. Measured output spectra of the OSSB modulator with different modulation frequencies.

Table 1. Numerical Values for MRM Electrical Parameters

Table 2. L and C Values Used for QHC Implementation