• Journal of Semiconductors
  • Vol. 41, Issue 4, 041604 (2020)
Haoran Fu1, Ke Bai2, Yonggang Huang3, and Yihui Zhang2
Author Affiliations
  • 1Institute of Flexible Electronic Technology of Tsinghua, Zhejiang, Jiaxing 314006, China
  • 2Center for Mechanics and Materials and Center for Flexible Electronics Technology, AML, Department of Engineering Mechanics, Tsinghua University, Beijing 100084, China
  • 3Departments of Civil and Environmental Engineering, Mechanical Engineering, and Materials Science and Engineering, Northwestern University, Evanston, IL, 60208, USA
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    DOI: 10.1088/1674-4926/41/4/041604 Cite this Article
    Haoran Fu, Ke Bai, Yonggang Huang, Yihui Zhang. Recent progress of morphable 3D mesostructures in advanced materials[J]. Journal of Semiconductors, 2020, 41(4): 041604 Copy Citation Text show less
    (Color online) Methods and applications of thermally actuated reconfiguration. (a) Shape evolution of two morphable mesostructures made of shape-memory polymers. Reproduced with permission from Ref. [32]. Copyright 2018, AAAS. (b) Shape evolution of LCE with mesogens aligned in groups. Reproduced with permission from Ref. [22]. Copyright 2015, AAAS. (c) Demonstration of a thermally actuated micro-tweezer made of SMA. Reproduced with permission from Ref. [18]. Copyright 2007, IOP Publishing Ltd.
    Fig. 1. (Color online) Methods and applications of thermally actuated reconfiguration. (a) Shape evolution of two morphable mesostructures made of shape-memory polymers. Reproduced with permission from Ref. [32]. Copyright 2018, AAAS. (b) Shape evolution of LCE with mesogens aligned in groups. Reproduced with permission from Ref. [22]. Copyright 2015, AAAS. (c) Demonstration of a thermally actuated micro-tweezer made of SMA. Reproduced with permission from Ref. [18]. Copyright 2007, IOP Publishing Ltd.
    (Color online) Methods and applications of chemically actuated reconfiguration. (a) Shape evolution of an ionoprinted hydrogel subject to different solvents. Reproduced with permission from Ref. [60]. Copyright 2013, Macmillan Publishers Limited. (b) Schematic illustration of a 3D jump micro hydrogel device, and scanning electron microscope (SEM) image of embedded microfluidic channels. Reproduced with permission from Ref. [61]. Copyright 2010, The Royal Society of Chemistry. (c) Evolution of the micro hydrogel device induced with a liquid solvent. Reproduced with permission from Ref. [61]. Copyright 2010, The Royal Society of Chemistry. (d) 2D-to-3D shape transformation of a tri-layer hydrogel subject to a variant pH. Reproduced with permission from Ref. [68]. Copyright 2014, John Wiley & Sons Inc.
    Fig. 2. (Color online) Methods and applications of chemically actuated reconfiguration. (a) Shape evolution of an ionoprinted hydrogel subject to different solvents. Reproduced with permission from Ref. [60]. Copyright 2013, Macmillan Publishers Limited. (b) Schematic illustration of a 3D jump micro hydrogel device, and scanning electron microscope (SEM) image of embedded microfluidic channels. Reproduced with permission from Ref. [61]. Copyright 2010, The Royal Society of Chemistry. (c) Evolution of the micro hydrogel device induced with a liquid solvent. Reproduced with permission from Ref. [61]. Copyright 2010, The Royal Society of Chemistry. (d) 2D-to-3D shape transformation of a tri-layer hydrogel subject to a variant pH. Reproduced with permission from Ref. [68]. Copyright 2014, John Wiley & Sons Inc.
    (Color online) Methods and applications of optically actuated reconfiguration. (a) Bending of a cantilever made of LCE with azobenzene under the exposure of light with different polarization angles. Reproduced with permission from Ref. [80]. Copyright 2011, The Royal Society of Chemistry. (b) Rolling of a LCE film induced through the application of visible and UV light. Reproduced with permission from Ref. [82]. Copyright 2008, John Wiley & Sons Inc. (c) Shape evolution of a bilayer film with photo-initiated proton-releasing agent. Reproduced with permission from Ref. [ 67]. Copyright 2012, The Royal Society of Chemistry.
    Fig. 3. (Color online) Methods and applications of optically actuated reconfiguration. (a) Bending of a cantilever made of LCE with azobenzene under the exposure of light with different polarization angles. Reproduced with permission from Ref. [80]. Copyright 2011, The Royal Society of Chemistry. (b) Rolling of a LCE film induced through the application of visible and UV light. Reproduced with permission from Ref. [82]. Copyright 2008, John Wiley & Sons Inc. (c) Shape evolution of a bilayer film with photo-initiated proton-releasing agent. Reproduced with permission from Ref. [ 67]. Copyright 2012, The Royal Society of Chemistry.
    (Color online) Methods and applications of magnetically actuated reconfiguration. (a) Milli-robots made of magnetoelastic soft materials. Reproduced with permission from Ref. [92]. Copyright 2018, Macmillan Publishers Limited. (b) Navigation of a ferromagnetic soft continuum robots through 3D cerebrovascular phantom network. Reproduced with permission from Ref. [96]. Copyright 2019, AAAS.
    Fig. 4. (Color online) Methods and applications of magnetically actuated reconfiguration. (a) Milli-robots made of magnetoelastic soft materials. Reproduced with permission from Ref. [92]. Copyright 2018, Macmillan Publishers Limited. (b) Navigation of a ferromagnetic soft continuum robots through 3D cerebrovascular phantom network. Reproduced with permission from Ref. [96]. Copyright 2019, AAAS.
    (Color online) Methods and applications of electrically actuated reconfiguration. (a) Schematic illustration of a robotic fish made of DE (left-hand panel), and forward motion of the fish (right-hand panel). Reproduced with permission from Ref. [110]. Copyright 2017, AAAS. (b) Shape reconfiguration of four actuators made of IPMC (top panel), and working process of a three-finger gripper (bottom panel). Reproduced with permission from Ref. [101]. Copyright 2008, Cambridge University Press. (c) Movement of an insect-scale robot made of PVDF. Reproduced with permission from Ref. [118]. Copyright 2019, AAAS.
    Fig. 5. (Color online) Methods and applications of electrically actuated reconfiguration. (a) Schematic illustration of a robotic fish made of DE (left-hand panel), and forward motion of the fish (right-hand panel). Reproduced with permission from Ref. [110]. Copyright 2017, AAAS. (b) Shape reconfiguration of four actuators made of IPMC (top panel), and working process of a three-finger gripper (bottom panel). Reproduced with permission from Ref. [101]. Copyright 2008, Cambridge University Press. (c) Movement of an insect-scale robot made of PVDF. Reproduced with permission from Ref. [118]. Copyright 2019, AAAS.
    (Color online) Methods and applications of mechanically actuated reconfiguration through the use of different strain release paths. (a) Illustration of the strategy through a sequence of FEA results and a pair of colorized SEM images for the two stable configurations. (b) SEM images and FEA predictions of morphable, recognizable objects. (c) Exploded view of the layer construction for a morphable electromagnetic device with shielding capability. (d) Optical images and FEA predictions of the device. (e) Simulated radiant efficiency of three antennas at two different stable shapes. Reproduced with permission from Ref. [137]. Copyright 2018, Macmillan Publishers Limited.
    Fig. 6. (Color online) Methods and applications of mechanically actuated reconfiguration through the use of different strain release paths. (a) Illustration of the strategy through a sequence of FEA results and a pair of colorized SEM images for the two stable configurations. (b) SEM images and FEA predictions of morphable, recognizable objects. (c) Exploded view of the layer construction for a morphable electromagnetic device with shielding capability. (d) Optical images and FEA predictions of the device. (e) Simulated radiant efficiency of three antennas at two different stable shapes. Reproduced with permission from Ref. [137]. Copyright 2018, Macmillan Publishers Limited.
    (Color online) Methods and applications of mechanically actuated reconfiguration assisted by kirigami substrate designs. (a) Conceptual illustration of the fabrication process, through a sequence of FEA results. (b) Two-dimensional geometries, FEA predictions, and scanning electron microscope images of a 3D morphable trilayer microstructure as mechanically tunable optical chiral metamaterials. (c) Measured and simulated optical circular dichroism of the 3D trilayer microstructure with two 3D shapes in the 0.2–0.4-THz frequency range. Reproduced with permission from Ref. [5], Copyright 2019, National Academy of Sciences.
    Fig. 7. (Color online) Methods and applications of mechanically actuated reconfiguration assisted by kirigami substrate designs. (a) Conceptual illustration of the fabrication process, through a sequence of FEA results. (b) Two-dimensional geometries, FEA predictions, and scanning electron microscope images of a 3D morphable trilayer microstructure as mechanically tunable optical chiral metamaterials. (c) Measured and simulated optical circular dichroism of the 3D trilayer microstructure with two 3D shapes in the 0.2–0.4-THz frequency range. Reproduced with permission from Ref. [5], Copyright 2019, National Academy of Sciences.
    Stimuli typeMechanism/materialAdvantageDisadvantageResponse timeReference
    Thermal stimuliShape-memory polymersRemote actuation; Large actuation strainSlow response Low actuation force15 min[32]
    Thermally responsive hydrogelLow transition temperatureRelatively slow response5–10 s[37]
    Liquid crystal elastomersRemote actuation; Complex reconfigurable geometryRelatively slow response15 s[22, 23]
    Shape-memory alloysHigh energy density; Large actuation strain and forceLimited operating temperature; Low bandwidth0.15–14 s[18, 140]
    Transition metal oxidesRemote actuation; High work density; Fast responseLow bandwidth0.34–12.5 ms[19, 141]
    Chemical stimuliSwelling deformation/ hydrogel Fast response possible biocompatibleSensitive to environment0.4 s –1 min[51, 60, 63]
    Swelling deformation/ inorganic materials Large actuation forceSensitive to environment3.4 s[65]
    Change of swelling ratioBiocompatibleSlow response; Sensitive to environment10 min[52]
    Optical stimuliDirect activationRemote actuation; Fast responseLow thermal stability12.5 ms[73, 75, 142]
    Indirect activationRemote actuationRelatively slow response30 s[67]
    Magnetic stimuliConventional polymer fabrication with magnetic particlesRemote actuation; Fast response; Multiple reconfigurable geometryLow actuation force for microscale structures< 0.25 s[88]
    Additive manufacture with magnetic particlesRemote actuation; Fast response complex initial geometryLow actuation force for microscale structures< 0.5 s[95]
    Individual magnetsRemote actuation; Fast responseChallenging to scale down to microscale0.4 s[98, 99, 143]
    Electric stimuliDielectric elastomersLarge actuation strain; Fast responseHigh voltage< 1 ms[144]
    Ionic polymer-metal compositesLow voltageRelatively slow response14 s[105]
    Piezoelectric materialsStable thermal and chemical properties; High power density; Fast response Relatively high voltage< 5 ms[121]
    Mechanical stimuliStrain release paths of substratesParallel reconfiguration; Diverse compatible material; Large applicable length scale; Multiple and complex reconfigurable geometryRelatively slow response> 20 s[137, 139]
    Table 1. Summary of reconfiguration methods.
    Haoran Fu, Ke Bai, Yonggang Huang, Yihui Zhang. Recent progress of morphable 3D mesostructures in advanced materials[J]. Journal of Semiconductors, 2020, 41(4): 041604
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