3D integrated photonics platform with deterministic geometry control

Jérôme Michon; Sarah Geiger; Lan Li; Claudia Goncalves; Hongtao Lin; Kathleen Richardson; Xinqiao Jia; Juejun Hu

doi:10.1364/PRJ.375584

Journals >Photonics Research >Volume 8 >Issue 2 >Page 194 > Article

Photonics Research
Vol. 8, Issue 2, 194 (2020)

3D integrated photonics platform with deterministic geometry control | Editors' Pick

Jérôme Michon^1、*, Sarah Geiger^1、2, Lan Li^3、4, Claudia Goncalves⁵, Hongtao Lin⁶, Kathleen Richardson⁵, Xinqiao Jia^2、7, and Juejun Hu^1、8

Author Affiliations

¹Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, USA

²Department of Biological Engineering, University of Delaware, Newark, Delaware 19716, USA

³Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province, School of Engineering, Westlake University, Hangzhou 310024, China

⁴Institute of Advanced Technology, Westlake Institute for Advanced Study, Hangzhou 310024, China

⁵College of Optics & Photonics, University of Central Florida, Orlando, Florida 32816, USA

⁶College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310027, China

⁷e-mail: xjia@udel.edu

⁸e-mail: hujuejun@mit.edu

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DOI: 10.1364/PRJ.375584 Cite this Article Set citation alerts

Jérôme Michon, Sarah Geiger, Lan Li, Claudia Goncalves, Hongtao Lin, Kathleen Richardson, Xinqiao Jia, Juejun Hu. 3D integrated photonics platform with deterministic geometry control[J]. Photonics Research, 2020, 8(2): 194 Copy Citation Text

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