[1] Yao Hanmin, Hu Song, Xing Tingwen. Micro-Nanofabrication Technology Based Optical Projection Exposure [M]. Beijing: Beijing University of Technology Press. 2006. 61～68

[2] Shaolin Zhou, Yongqi Fu, Xiaoping Tang et al.. Fourier-based analysis of moiré fringe patterns of superposed gratings in alignment of nanolithography[J]. Opt. Express, 2008, 16(11): 7869～7880

[3] Zhou Shaolin, Yang Yong, Chen Wangfu et al.. Dual-grating-based nanometer measurement ［J］. Acta Optica Sinica, 2009, 29(3): 702～706

[4] R. A. Nicolaus. Precise method to determine systematic errors in phase-shifting interferometry on Fizeau interferences［J］. Appl. Opt., 1993, 32(31): 6380～6386

[5] P. D. Groot. Phase-shift calibration errors in interferometers with spherical Fizeau cavities ［J］. Appl. Opt., 1995, 34(16): 2856～2863

[6] J. Schwider, O. Fallkenstorfer, H. Schreiber et al.. New compensating four-phase algorithm for phase-shift interometry［J］. Opt. Eng., 1993, 32(8): 1883～1885

[7] Qian Kemao, Miao Hong, Wu Xiaoping. A real-time polarization phase shifting technique for dynamic measurement ［J］. Acta Optica Sinica, 2001, 21(1): 64～67

[8] M. Servin, J. L. Marroquin, F. J. Cuevas. Demodulation of a single interferogram by use of a two-dimensional regularized phase-tracking technique［J］. Appl. Opt., 1997, 36(19): 4540～4548

[9] Mitsuo Taketa, Hideki Ina, Seiji Kobayashi. Fourier-transform method of fringe-pattern analysis for computer-based topography and interferometry［J］. J. Opt. Soc. Am, 1982, 72(1): 156～160

[10] Qian Kemao. Windowed Fourier transform for fringe pattern analysis［J］. Appl. Opt., 2004, 43(18): 2695～2702

[11] Qian Kemao. Two-dimensional windowed Fourier transform for fringe pattern analysis: principle, applications, and implementations ［J］. Opt. & Lasers Eng., 2007, 45(2): 304～307

[12] Qian Kemao. A simple phase unwrapping approach based on filtering by windowed Fourier transform: a note on the threshold selection ［J］. Opt. & Laser Technol., 2008, 40(8): 1091～1098

[13] Wen Jiawen, Zhong Jingang. Apply wavelet transform to phase analysis of spatial carrier-fringe patterns ［J］. Acta Optica Sinica, 2005, 25(4): 454～459

[14] Jingang Zhong, Jiawen Weng. Phase retrieval of optical fringe patterns from the ridge of a wavelet transform［J］. Opt. Lett., 2006, 30(19): 2560～2562

[15] H. Liu, A. N. Cartwright, C. Basaran. Moire interferogram phase extraction: a ridge detection algorithm for continuous wavelet transforms［J］. Appl. Opt., 2004, 43(4): 850～857

[16] Michael Liebling, T. F. Bernhard. A. H. Bachmann. Continuous wavelet transform ridge extraction for spectral interferometry imaging［C］. SPIE, 2005, 5690: 397～402

[17] L. R. Watkins, S. M. Tan, T. H. Barnes. Determination of interferometer phase distributions by use of wavelets［J］. Opt. Lett., 1999, 24(13): 905～907

[18] Zheng Suzhen, Chen Wenjing, Su Xianyu. Phase analysis based on complex Morlet wavelet ［J］. Opto-Electronic Engineering, 2007, 34(4): 73～76