Analysis of Diffraction Effect in Phase Shifting Microscopic Interferometry

[in Chinese]; [in Chinese]; [in Chinese]

Journals >Acta Optica Sinica >Volume 18 >Issue 7 >Page 877 > Article

Acta Optica Sinica
Vol. 18, Issue 7, 877 (1998)

Analysis of Diffraction Effect in Phase Shifting Microscopic Interferometry

[in Chinese], [in Chinese], and [in Chinese]

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[in Chinese]

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[in Chinese], [in Chinese], [in Chinese]. Analysis of Diffraction Effect in Phase Shifting Microscopic Interferometry[J]. Acta Optica Sinica, 1998, 18(7): 877 Copy Citation Text

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References

[1] K. Creath. Phase-measurement interferometry techniques. In: E. Wolfed. Progressin Optics, XXVI. Amsterdam: Elsevier Science Publishers, 1988. 351～393

[2] J. Schwider. Advanced evaluation techniques in interferometry. In E. Wolfed. Progressin Optics, XXIX. Amsterdam: Elsevier Science Publishers, 1990. 271～359

[3] J. C. Wyant. How to extend interferometry for rough-surface tests. Laser Focus World, 1993, 29(5): 131～133

[4] G. S. Kino, S. S. C. Chim. Mirau Correlation microscope. Appl. Opt., 1990, 29(26): 3775～378

[in Chinese], [in Chinese], [in Chinese]. Analysis of Diffraction Effect in Phase Shifting Microscopic Interferometry[J]. Acta Optica Sinica, 1998, 18(7): 877

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