Tiansheng ZHONG, Shunjie YU, Xiaolong ZHAO, Mengfan DING, Fangzhou LIANG, Shi FANG, Zhongfang ZHANG, Xiaohu HOU, Haiding SUN, Guangwei XU, Qin HU, Shibing LONG. High-performance Solar-blind and X-ray Detector Based on Ultra-thin Gallium Oxide Film Grown by MOCVD（Invited）[J]. Acta Photonica Sinica, 2021, 50(10): 1004001
- Acta Photonica Sinica
- Vol. 50, Issue 10, 1004001 (2021)
Fig. 1. Growth and characterization of 70 nm Ga2O3 film
Fig. 2. Schematic and spectral response of the MSM Ga2O3 PD
Fig. 3. I-V characteristic curves of MSM Ga2O3 PD
Fig. 4. Various parameters as a function of different light intensities and voltages
Fig. 5. I-t curve and respond time of MSM Ga2O3 PD under different conditions
Fig. 6. X-ray response test of MSM Ga2O3 PD
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Table 1. Performance of Ga2O3 SBUV PD grown by different methods
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Table 2. Equivalent thickness sensitivity of different X-ray detectors
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