• Acta Photonica Sinica
  • Vol. 50, Issue 10, 1004001 (2021)
Tiansheng ZHONG, Shunjie YU, Xiaolong ZHAO*, Mengfan DING, Fangzhou LIANG, Shi FANG, Zhongfang ZHANG, Xiaohu HOU, Haiding SUN, Guangwei XU, Qin HU, and Shibing LONG*
Author Affiliations
  • School of Microelectronics,University of Science and Technology of China,Hefei 230026,China
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    DOI: 10.3788/gzxb20215010.1004001 Cite this Article
    Tiansheng ZHONG, Shunjie YU, Xiaolong ZHAO, Mengfan DING, Fangzhou LIANG, Shi FANG, Zhongfang ZHANG, Xiaohu HOU, Haiding SUN, Guangwei XU, Qin HU, Shibing LONG. High-performance Solar-blind and X-ray Detector Based on Ultra-thin Gallium Oxide Film Grown by MOCVD(Invited)[J]. Acta Photonica Sinica, 2021, 50(10): 1004001 Copy Citation Text show less

    Abstract

    Complying with the trend of small size, multi-functionality, and high density integration of photoelectric detectors and arrays, a high-performance solar-blind and X-ray dual function detector basedon ultra-thin Ga2O3 was reported. Based on the metal-organic chemical vapor deposition, through fine tuning of growth at high temperature, a thin thickness (70 nm) of high-quality gallium oxide heteroepitaxial thin film is realized. Owing to the ultra-wide band gap of Ga2O3 and the high quality of the film, metal-semiconductor-metal structure photodetector based on this film has achieved a photo-to-dark current ratio of 5.5×107, detectivity of 4.65×1015 Jones, external quantum efficiency of 3.53×104%, and responsivity of 72.23 A/W in solar-blind ultraviolet detection band. What's more, the above-mentioned solar-blind ultraviolet performances remain stable relatively at different solar-blind light intensities (14.7~548 μW/cm2). While for X-ray detection, an ultra-high sensitivity of 1.91×104 μC·cm-2·Gy-1 is achieved, which exceeds the previously reported Ga2O3 thin-film detectors under the equivalent thickness. Besides, the device can still achieve comprehensively high performance at a lower operating voltage. The improvement of film quality, ionization of intrinsic oxygen vacancies, and photoinduced Schottky barrier reduction effect etc. conribute to the excellent photoresponse performance of this Ga2O3 thin-film detectors under both solar-blind and X-ray illumination. Additionally, the cascade effect casused by the X-ray induced high-erergy electrons is another critial aspect for the high X-ray sensitivity of the device. This work provides potential inspirations for ultra-thin solar-blind and X-ray detectors with high performance and low power consumption in the future.
    Tiansheng ZHONG, Shunjie YU, Xiaolong ZHAO, Mengfan DING, Fangzhou LIANG, Shi FANG, Zhongfang ZHANG, Xiaohu HOU, Haiding SUN, Guangwei XU, Qin HU, Shibing LONG. High-performance Solar-blind and X-ray Detector Based on Ultra-thin Gallium Oxide Film Grown by MOCVD(Invited)[J]. Acta Photonica Sinica, 2021, 50(10): 1004001
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