• Acta Photonica Sinica
  • Vol. 50, Issue 10, 1004001 (2021)
Tiansheng ZHONG, Shunjie YU, Xiaolong ZHAO*, Mengfan DING..., Fangzhou LIANG, Shi FANG, Zhongfang ZHANG, Xiaohu HOU, Haiding SUN, Guangwei XU, Qin HU and Shibing LONG*|Show fewer author(s)
Author Affiliations
  • School of Microelectronics,University of Science and Technology of China,Hefei 230026,China
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    DOI: 10.3788/gzxb20215010.1004001 Cite this Article
    Tiansheng ZHONG, Shunjie YU, Xiaolong ZHAO, Mengfan DING, Fangzhou LIANG, Shi FANG, Zhongfang ZHANG, Xiaohu HOU, Haiding SUN, Guangwei XU, Qin HU, Shibing LONG. High-performance Solar-blind and X-ray Detector Based on Ultra-thin Gallium Oxide Film Grown by MOCVD(Invited)[J]. Acta Photonica Sinica, 2021, 50(10): 1004001 Copy Citation Text show less

    Abstract

    Complying with the trend of small size, multi-functionality, and high density integration of photoelectric detectors and arrays, a high-performance solar-blind and X-ray dual function detector basedon ultra-thin Ga2O3 was reported. Based on the metal-organic chemical vapor deposition, through fine tuning of growth at high temperature, a thin thickness (70 nm) of high-quality gallium oxide heteroepitaxial thin film is realized. Owing to the ultra-wide band gap of Ga2O3 and the high quality of the film, metal-semiconductor-metal structure photodetector based on this film has achieved a photo-to-dark current ratio of 5.5×107, detectivity of 4.65×1015 Jones, external quantum efficiency of 3.53×104%, and responsivity of 72.23 A/W in solar-blind ultraviolet detection band. What's more, the above-mentioned solar-blind ultraviolet performances remain stable relatively at different solar-blind light intensities (14.7~548 μW/cm2). While for X-ray detection, an ultra-high sensitivity of 1.91×104 μC·cm-2·Gy-1 is achieved, which exceeds the previously reported Ga2O3 thin-film detectors under the equivalent thickness. Besides, the device can still achieve comprehensively high performance at a lower operating voltage. The improvement of film quality, ionization of intrinsic oxygen vacancies, and photoinduced Schottky barrier reduction effect etc. conribute to the excellent photoresponse performance of this Ga2O3 thin-film detectors under both solar-blind and X-ray illumination. Additionally, the cascade effect casused by the X-ray induced high-erergy electrons is another critial aspect for the high X-ray sensitivity of the device. This work provides potential inspirations for ultra-thin solar-blind and X-ray detectors with high performance and low power consumption in the future.
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    Tiansheng ZHONG, Shunjie YU, Xiaolong ZHAO, Mengfan DING, Fangzhou LIANG, Shi FANG, Zhongfang ZHANG, Xiaohu HOU, Haiding SUN, Guangwei XU, Qin HU, Shibing LONG. High-performance Solar-blind and X-ray Detector Based on Ultra-thin Gallium Oxide Film Grown by MOCVD(Invited)[J]. Acta Photonica Sinica, 2021, 50(10): 1004001
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