• Chinese Journal of Lasers
  • Vol. 48, Issue 8, 0802018 (2021)
Genwang Wang1、2, Yanchao Guan1、2, Yang Wang1、2, Ye Ding1、2、**, and Lijun Yang1、2、*
Author Affiliations
  • 1Key Laboratory of Microsystems and Microstructures Manufacturing, Ministry of Education, Harbin Institute of Technology, Harbin, Heilongjiang 150001, China
  • 2School of Mechatronics Engineering, Harbin Institute of Technology, Harbin, Heilongjiang 150001, China
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    DOI: 10.3788/CJL202148.0802018 Cite this Article Set citation alerts
    Genwang Wang, Yanchao Guan, Yang Wang, Ye Ding, Lijun Yang. Recent Progress in Research and Application of Nano-Manipulation Technologies[J]. Chinese Journal of Lasers, 2021, 48(8): 0802018 Copy Citation Text show less
    Principle of typical nano-manipulation based on SPM[20]
    Fig. 1. Principle of typical nano-manipulation based on SPM[20]
    Nano-manipulation for acquiring real-time imaging. (a) Schematic of nano-manipulation with simultaneous visual guidance[21]; (b) ghost images behind the moving particle provide a visual guidance[21]; (c) schematic of the parallel imaging/manipulation system[23]
    Fig. 2. Nano-manipulation for acquiring real-time imaging. (a) Schematic of nano-manipulation with simultaneous visual guidance[21]; (b) ghost images behind the moving particle provide a visual guidance[21]; (c) schematic of the parallel imaging/manipulation system[23]
    Schematic of the “3D” assembly of Au NSs[28]. (a) Au NSs were printed onto a PMMA nanohole template; (b) three Au NSs were pushed and dropped onto the bottom of the PMMA nanohole to form trimer; (c) remaining Au NS was pushed onto the already assembled trimer
    Fig. 3. Schematic of the “3D” assembly of Au NSs[28]. (a) Au NSs were printed onto a PMMA nanohole template; (b) three Au NSs were pushed and dropped onto the bottom of the PMMA nanohole to form trimer; (c) remaining Au NS was pushed onto the already assembled trimer
    AFM nano-manipulation of gold nanowires to build electrical circuits[33]. (a) Distribution of nanowires before manipulation; (b) electrical circuits after manipulation
    Fig. 4. AFM nano-manipulation of gold nanowires to build electrical circuits[33]. (a) Distribution of nanowires before manipulation; (b) electrical circuits after manipulation
    Nanorobotic manipulators and its application in testing of nanomaterials[35]. (a) Nanorobotic manipulators; (b) stretching of nanotubes
    Fig. 5. Nanorobotic manipulators and its application in testing of nanomaterials[35]. (a) Nanorobotic manipulators; (b) stretching of nanotubes
    Manipulation system with vision feedback control[42]. (a) Manipulation system; (b) CNT picked up with AFM cantilever
    Fig. 6. Manipulation system with vision feedback control[42]. (a) Manipulation system; (b) CNT picked up with AFM cantilever
    CNT/Au contact and electrical performance measurement[60]. (a) SEM image of connection structure; (b) measured I-V curve of CNT/Au contact
    Fig. 7. CNT/Au contact and electrical performance measurement[60]. (a) SEM image of connection structure; (b) measured I-V curve of CNT/Au contact
    Trapping and rotation of Ag nanowires by the Bessel-beam[66]
    Fig. 8. Trapping and rotation of Ag nanowires by the Bessel-beam[66]
    Enhancement of near-field optical tweezers manipulation. (a) Two-dimensional nanoscale plasmonic optical lattice[75]; (b) double-nanohole structures[77]
    Fig. 9. Enhancement of near-field optical tweezers manipulation. (a) Two-dimensional nanoscale plasmonic optical lattice[75]; (b) double-nanohole structures[77]
    Trapping and manipulation by using the four-core fiber[80]. (a) Schematic of trapping and manipulation; (b) SEM image of fiber-end
    Fig. 10. Trapping and manipulation by using the four-core fiber[80]. (a) Schematic of trapping and manipulation; (b) SEM image of fiber-end
    MethodAdvantageDisadvantageApplication
    Nano-manipulationbased on SPMForce-feedback system for accurately locating;Three-dimensional location information of objectives and probesLimitation in real-time imaging during manipulation;Inadequacy in complexmanipulationSimple and high-precision manipulation for small objectives
    Nano-manipulationbased on EMReal-time imaging during manipulation;Complex manipulation by using a variety of toolsLack of depth information of objectives and probes;Only suitable for objectives which can withstand vacuum and irradiation of electron beamThree-dimensional and complex manipulation;Fabrication and assembly of nano-structures
    Optical tweezersNon-contact manipulation;Suitable for particles up to several nanometers in diameterSmall optical forces;Manipulation in liquidenvironmentTrapping smaller objectives;Simple movement of objectives
    Table 1. Characteristic and application of nano-manipulation based on SPM, EM, and optical tweezers
    Genwang Wang, Yanchao Guan, Yang Wang, Ye Ding, Lijun Yang. Recent Progress in Research and Application of Nano-Manipulation Technologies[J]. Chinese Journal of Lasers, 2021, 48(8): 0802018
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