Renjie Ruan, Yinhua Cao, Xiaofan Wang, Yanhong Ma, Zhiyong Wang, Tian Lan. Design of on-chip dot array structured light projector using bottom-emitting VCSEL[J]. Infrared and Laser Engineering, 2022, 51(6): 20210640
- Infrared and Laser Engineering
- Vol. 51, Issue 6, 20210640 (2022)
Fig. 1. Schematic diagram of existing dot array structured light projector
Fig. 2. Schematic diagram of on-chip dot array structured light projector
Fig. 3. Dot array coded pattern
Fig. 4. Simulation results under different sampling ratio
Fig. 5. Output light intensity distribution of structure-1
Fig. 6. Comparison diagram of evaluation index under different sampling ratio
Fig. 7. Evaluation index under different oxide apertures
Fig. 8. Evaluation index under different thickness of substrate
Fig. 9. Simulation results under the optimized design parameters
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Table 1. Structural parameters used in structure-2
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