Direct laser writing breaking diffraction barrier based on two-focus parallel peripheral-photoinhibition lithography

Dazhao Zhu; Liang Xu; Chenliang Ding; Zhenyao Yang; Yiwei Qiu; Chun Cao; Hongyang He; Jiawei Chen; Mengbo Tang; Lanxin Zhan; Xiaoyi Zhang; Qiuyuan Sun; Chengpeng Ma; Zhen Wei; Wenjie Liu; Xiang Fu; Cuifang Kuang; Haifeng Li; Xu Liu

doi:10.1117/1.AP.4.6.066002

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