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Journals >Acta Optica Sinica >Volume 18 >Issue 6 >Page 675 > Article

Acta Optica Sinica
Vol. 18, Issue 6, 675 (1998)

Laser Plasma Soft X-Ray Source with Cryogenic Target

[in Chinese]¹, [in Chinese]¹, [in Chinese]¹, [in Chinese]², and [in Chinese]¹

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¹[in Chinese]

²[in Chinese]

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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Laser Plasma Soft X-Ray Source with Cryogenic Target[J]. Acta Optica Sinica, 1998, 18(6): 675 Copy Citation Text

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Abstract

A new type of laser plasma soft X-ray source with solid CO2 target is reported. The laser plasma source is of low debris characteristics and very suitable for soft X-ray projection lighography in the future.

Keywords

cryogenic target soft X-ray source laser plasma

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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Laser Plasma Soft X-Ray Source with Cryogenic Target[J]. Acta Optica Sinica, 1998, 18(6): 675

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