elements Si concave microlenses array was fabricated by a new method, i.e. the curvature inversion method. Scanning electron microscope (SEM) shows that microlenses have distinct concave cylinder contour. Surface stylus measurement shows that the concave microlenses array has smooth surface and uniform dimensions. For the concave microlenses array, the average depth of concave spherical surface is 2.643μm, the nonuniformity of the depth is 8.45% and the average focal length is -47.08μm.