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    Journals >Laser & Optoelectronics Progress >Volume 53 >Issue 8 >Page 81201 > Article
    • Laser & Optoelectronics Progress
    • Vol. 53, Issue 8, 81201 (2016)
    Design and Performance Testing of Constant-Temperature Water Jacket Small-Scale Model of Lithographic Projection Lens
    Peng Haifeng1、*, Yu Xinfeng1, and Qin Shuo2
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    DOI: 10.3788/lop53.081201 Cite this Article Set citation alerts
    Peng Haifeng, Yu Xinfeng, Qin Shuo. Design and Performance Testing of Constant-Temperature Water Jacket Small-Scale Model of Lithographic Projection Lens[J]. Laser & Optoelectronics Progress, 2016, 53(8): 81201 Copy Citation Text show less
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    Article index updated: May. 16, 2024
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    Peng Haifeng, Yu Xinfeng, Qin Shuo. Design and Performance Testing of Constant-Temperature Water Jacket Small-Scale Model of Lithographic Projection Lens[J]. Laser & Optoelectronics Progress, 2016, 53(8): 81201
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