• Acta Physica Sinica
  • Vol. 68, Issue 7, 078501-1 (2019)
Dao-You Guo1, Pei-Gang Li2、3, Zheng-Wei Chen2, Zhen-Ping Wu2, and Wei-Hua Tang2、3、*
Author Affiliations
  • 1Center for Optoelectronics Materials and Devices, Department of Physics, Zhejiang Sci-Tech University, Hangzhou 310018, China
  • 2Laboratory of Information Functional Materials and Devices, School of Science, Beijing University of Posts and Telecommunications, Beijing 100876, China
  • 3State Key Laboratory of Information Photonics and Optical Communications, Beijing University of Posts and Telecommunications, Beijing 100876, China
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    DOI: 10.7498/aps.68.20181845 Cite this Article
    Dao-You Guo, Pei-Gang Li, Zheng-Wei Chen, Zhen-Ping Wu, Wei-Hua Tang. Ultra-wide bandgap semiconductor of β-Ga2O3 and its research progress of deep ultraviolet transparent electrode and solar-blind photodetector [J]. Acta Physica Sinica, 2019, 68(7): 078501-1 Copy Citation Text show less
    References

    [1] Cheng Y 2013 Ph. D. Dissertation (Dalian: Dalian University of Technology) (in Chinese)

    [2] Ma H L, Su Q[J]. Acta Phys. Sin., 63, 116701(2014).

    [3] Pan H P, Cheng F F, Li L, Hong R H, Yao S D[J]. Acta Phys. Sin., 62, 048801(2013).

    [4] Roy R, Hill V G, Osborn E F[J]. J. Am. Chem. Soc., 74, 719(1952).

    [5] Kaneko K, Nomura T, Kakeya I, Fujita S[J]. Appl. Phys. Express, 2, 075501(2009).

    [6] Fujita S, Kaneko K[J]. J. Cryst. Growth, 401, 588(2014).

    [7] Shinohara D, Fujita S[J]. Jpn. J. Appl. Phys., 47, 7311(2008).

    [8] Schewski R, Wagner G, Baldini M, Gogova D, Galazka Z, Schulz T, Remmele T, Markurt T, Wenckstern H V, Grundmann M, Bierwagen O, Vogt P, Albrecht M[J]. Appl. Phys. Express, 8, 011101(2015).

    [9] Lee S D, Akaiwa K, Fujita S[J]. Phys. Status Solidi C, 10, 1592(2013).

    [10] Lee S D, Ito Y, Kaneko K, Fujita S[J]. Jpn. J. Appl. Phys., 54, 030301(2015).

    [11] Kaneko K, Nomura T, Fujita S[J]. Phys. Status Solidi C, 7, 2467(2010).

    [12] Kaneko K, Kakeya I, Komori S, Fujita S[J]. J. Appl. Phys., 113, 233901(2013).

    [13] Mitome M, Kohiki S, Nagai T, Kurashima K, Kimoto K, Bando Y[J]. Cryst. Growth Des., 13, 3577(2013).

    [14] Wang T, Farvid S S, Abulikemu M, Radovanovic P V[J]. J. Am. Chem. Soc., 132, 9250(2010).

    [15] Playford H Y, Hannon A C, Tucker M G, Dawson D M, Ashbrook S E, Kastiban R J, Sloan J, Walton R I[J]. J. Phys. Chem. C, 118, 16188(2014).

    [16] Lorenzi R, Paleari A, Golubev N V, Ignat'eva E S, Sigaev V N, Niederberger M, Lauria A[J]. J. Mater. Chem. C, 3, 41(2015).

    [17] Takahashi M, Nakatani T, Iwamoto S, Watanabe T, Inoue M[J]. J. Phys. Condens Matter, 18, 5745(2006).

    [18] Oshima Y, Víllora E G, Matsushita Y, Yamamoto S, Shimamura K[J]. J. Appl. Phys., 118, 085301(2015).

    [19] Ge S X, Zheng Z[J]. Solid State Sci., 11, 1592(2009).

    [20] Tsuchiya T, Yusa H, Tsuchiya J[J]. Phys. Rev. B, 76, 174108(2007).

    [21] Bermudez V M[J]. Chem. Phys., 323, 193(2006).

    [22] Yamaga M, Víllora E G, Shimamura K, Ichinose N, Honda M[J]. Phys. Rev. B, 68, 155207(2003).

    [23] Zacherle T, Schmidt P C, Martin M[J]. Phys. Rev. B, 87, 235206(2013).

    [24] Orita M, Hiramatsu H, Ohta H, Hirano M, Hosono H[J]. Thin Solid Films, 411, 134(2002).

    [25] Higashiwaki M, Sasaki K, Kuramata A, Masui T, Yamakoshi S[J]. Appl. Phys. Lett., 100, 013504(2012).

    [26] Dong L, Jia R, Xin B, Zhang Y[J]. J. Vac. Sci. Technol., A, 34, 060602(2016).

    [27] Dong L, Jia R, Xin B, Peng B, Zhang Y[J]. Sci. Rep., 7, 40160(2017).

    [28] Tao X T[J]. J. Semicond., 40, 010401(2019).

    [29] Fu B, Jia Z T, Mu W X, Yin Y R, Zhang J, Tao X T[J]. J. Semicond., 40, 011804(2019).

    [30] Mohamed H F, Xia C T, Sai Q L, Cui H Y, Pan M Y, Qi H J[J]. J. Semicond., 40, 011801(2019).

    [31] Higashiwaki M, Sasaki K, Murakami H, Kumagai Y, Koukitu A, Kuramata A, Masui T, Yamakoshi S[J]. Semicond. Sci. Technol., 31, 034001(2016).

    [32] Razeghi M[J]. Proc. IEEE, 90, 1006(2002).

    [33] Du X, Mei Z, Liu Z, Guo Y, Zhang T, Hou Y, Zhang Z, Xue Q, Kuznetsov A Y[J]. Adv. Mater., 21, 4625(2009).

    [34] Higashiwaki M, Sasaki K, Kuramata A, Masui T, Yamakoshi S[J]. Phys. Status Solidi A, 211, 21(2014).

    [35] Higashiwaki M, Jessen G H[J]. Appl. Phys. Lett., 112, 060401(2018).

    [36] Villora E G, Arjoca S, Shimamura K, Inomata D, Aoki K[J]. Proc. of SPIE, 8987, 1(2014).

    [37] Wellenius P, Suresh A, Foreman J V, Everitt H O, Muth J F[J]. Mater. Sci. Eng. B, 146, 252(2008).

    [38] Wellenius P, Suresh A, Muth J F[J]. Appl. Phys. Lett., 92, 021111(2008).

    [39] Vanithakumari S C, Nanda K K[J]. Adv. Mater., 21, 3581(2009).

    [40] Lin C F, Chen K T, Huang K P[J]. IEEE Electron Device Lett., 31, 1431(2010).

    [41] Choi S E, Oh Y T, Ham H K, Kim T W, Heo G S, Park J W, Choi B H, Shin D C[J]. Curr. Appl. Phys., 11, S255(2011).

    [42] Iizuka K, Morishima Y, Kuramata A, Shen Y J, Tsai C Y, Su Y Y, Liu G, Hsu T C, Yeh J H[J]. Proc. of SPIE, 9363, 1(2015).

    [43] Schwebel T, Fleischer M, Meixner H, Kohl C D[J]. Sens. Actuators B, 49, 46(1998).

    [44] Kohl D, Ochs T, Geyer W, Fleischer M, Meixner H[J]. Sens. Actuators B, 59, 140(1999).

    [45] Ogita M, Saika N, Nakanishi Y, Hatanaka Y[J]. Appl. Surf. Sci., 142, 188(1999).

    [46] Schwebel T, Fleischer M, Meixner H[J]. Sens. Actuators B, 65, 176(2000).

    [47] Baban C, Toyoda Y, Ogita M[J]. Thin Solid Films, 484, 369(2005).

    [48] Bartic M, Toyoda Y, Baban C I, Ogita M[J]. Jpn. J. Appl. Phys., Part1, 45, 5186(2006).

    [49] Feng P, Xue X Y, Liu Y G, Wan Q, Wang T H[J]. Appl. Phys. Lett., 89, 112114(2006).

    [50] Bartic M, Baban C I, Suzuki H, Ogita M, Isai M[J]. J. Am. Ceram. Soc., 90, 2879(2007).

    [51] Liu Z F, Yamazaki T, Shen Y, Kikuta T, Nakatani N, Li Y[J]. Sens. Actuators B, 129, 666(2008).

    [52] Arnold S P, Prokes S M, Perkins F K, Zaghloul M E[J]. Appl. Phys. Lett., 95, 103102(2009).

    [53] Lee C T, Yan J T[J]. Sens. Actuators B, 147, 723(2010).

    [54] Hou Y, Jayatissa A H[J]. Sens. Actuators B, 204, 310(2014).

    [55] Bartic M[J]. Phys. Status Solidi A, 211, 40(2015).

    [56] Hayashi H, Huang R, Ikeno H, Oba F, Yoshioka S, Tanaka I, Sonoda S[J]. Appl. Phys. Lett., 89, 181903(2006).

    [57] Pei G, Xia C, Dong Y, Wu B, Wang T, Xu J[J]. Scr. Mater., 58, 943(2008).

    [58] Guo D Y, Wu Z P, An Y H, Li X J, Guo X C, Chu X L, Sun C L, Lei M, Li L H, Cao L X, Li P G, Tang W H[J]. J. Mater. Chem. C, 3, 1830(2015).

    [59] Guo D Y, Wu Z P, Li P G, Wang Q J, Lei M, Li L H, Tang W H[J]. RSC Adv., 5, 12894(2015).

    [60] Guo D Y, An Y H, Cui W, Zhi Y S, Zhao X L, Lei M, Li L H, Li P G, Wu Z P, Tang W H[J]. Sci. Rep., 6, 25166(2016).

    [61] Gao X, Xia Y, Ji J, Xu H, Su Y, Li H, Yang C, Guo H, Yin J, Liu Z[J]. Appl. Phys. Lett., 97, 193501(2010).

    [62] Yang J B, Chang T C, Huang J J, Chen S C, Yang P C, Chen Y T, Tseng H C, Sze S M, Chu A K, Tsai M J[J]. Thin Solid Films, 529, 200(2013).

    [63] Aoki Y, Wiemann C, Feyer V, Kim H S, Schneider C M, Ill-Yoo H, Martin M[J]. Nat. Commun., 5, 3473(2014).

    [64] Hsu C W, Chou L J[J]. Nano Lett., 12, 4247(2012).

    [65] Lee D Y, Tseng T Y[J]. J. Appl. Phys., 110, 114117(2011).

    [66] Huang J J, Chang T C, Yang J B, Chen S C, Yang P C, Chen Y T, Tseng H C, Sze S M, Chu A K, Tsai M J[J]. IEEE Electron Device Lett., 33, 1387(2012).

    [67] Yang J B, Chang T C, Huang J J, Chen Y T, Yang P C, Tseng H C, Chu A K, Sze S M, Tsai M J[J]. Thin Solid Films, 528, 26(2013).

    [68] Guo D Y, Wu Z P, An Y H, Li P G, Wang P C, Chu X L, Guo X C, Zhi Y S, Lei M, Li L H, Tang W H[J]. Appl. Phys. Lett., 106, 042105(2015).

    [69] Guo D Y, Wu Z P, Zhang L J, Yang T, Hu Q R, Lei M, Li P G, Li L H, Tang W H[J]. Appl. Phys. Lett., 107, 032104(2015).

    [70] Guo D Y, Qian Y P, Su Y L, Shi H Z, Li P G, Wu J T, Wang S L, Cui C, Tang W H[J]. AIP Adv., 7, 065312(2017).

    [71] Wang P C, Li P G, Zhi Y S, Guo D Y, Pan A Q, Zhan J M, Liu H, Shen J Q, Tang W H[J]. Appl. Phys. Lett., 107, 262110(2015).

    [72] Gollakota P, Dhawan A, Wellenius P, Lunardi L M, Muth J F, Saripalli Y N[J]. Appl. Phys. Lett., 88, 221906(2006).

    [73] Sawada K, Adachi S[J]. ECS J. Solid State Sci., 3, R238(2014).

    [74] Kang B K, Mang S R, Lim H D, Song K M, Song Y H, Go D H, Jung M K, Senthil K, Yoon D H[J]. Mater. Chem. Phys., 147, 178(2014).

    [75] Wu Z, Bai G, Hu Q, Guo D, Sun C, Ji L, Lei M, Li L, Li P, Hao J, Tang W[J]. Appl. Phys. Lett., 106, 171910(2015).

    [76] Wu Z, Bai G, Qu Y, Guo D, Li L, Li P, Hao J, Tang W[J]. Appl. Phys. Lett., 108, 211903(2016).

    [77] Li W, Peng Y, Wang C, Zhao X, Zhi Y, Yan H, Li L, Li P, Yang H, Wu Z, Tang W[J]. J. Alloys Compd., 697, 388(2017).

    [78] Orita M, Ohta H, Hirano M, Hosono H[J]. Appl. Phys. Lett., 77, 4166(2000).

    [79] Suzuki N, Ohira S, Tanaka M, Sugawara T, Nakajima K, Shishido T[J]. Phys. Status Solidi C, 4, 2310(2007).

    [80] Ou S L, Wuu D S, Fu Y C, Liu S P, Horng R H, Liu L, Feng Z C[J]. Mater. Chem. Phys., 133, 700(2012).

    [81] Du X J, Li Z, Luan C N, Wang W G, Wang M X, Feng X J, Xiao H D, Ma J[J]. J. Mater. Sci., 50, 3252(2015).

    [82] Mi W, Li Z, Luan C N, Xiao H D, Zhao C S, Ma J[J]. Ceram. Int., 41, 2572(2015).

    [83] Minami T, Takeda Y, Kakumu T, Takata S, Fukuda I[J]. J. Vac. Sci. Technol., A, 15, 958(1997).

    [84] Kim S, Kim S J, Kim K H, Kim H D, Kim T G[J]. Phys. Status Solidi A, 211, 2569(2014).

    [85] Kim S J, Park S Y, Kim K H, Kim S W, Kim T G[J]. IEEE Electron Device Lett., 35, 232(2014).

    [86] Woo K Y, Lee J H, Kim K H, Kim S J, Kim T G[J]. Phys. Status Solidi A, 211, 1760(2014).

    [87] Zhuang H H, Yan J L, Xu C Y, Meng D L[J]. Appl. Surf. Sci., 307, 241(2014).

    [88] Li Y, Tokizono T, Liao M, Zhong M, Koide Y, Yamada I, Delaunay J J[J]. Adv. Funct. Mater., 20, 3972(2010).

    [89] Oshima T, Okuno T, Arai N, Suzuki N, Hino H, Fujita S[J]. Jpn. J. Appl. Phys., 48, 011605(2009).

    [90] Oshima T, Okuno T, Fujita S[J]. Jpn. J. Appl. Phys., 46, 7217(2007).

    [91] Feng P, Zhang J Y, Li Q H, Wang T H[J]. Appl. Phys. Lett., 88, 153107(2006).

    [92] Weng W Y, Hsueh T J, Chang S J, Huang G J, Chang S P[J]. IEEE Photonics Technol. Lett., 22, 709(2010).

    [93] Wu Y L, Chang S J, Weng W Y, Liu C H, Tsai T Y, Hsu C L, Chen K C[J]. IEEE Sens. J., 13, 2368(2013).

    [94] Li L, Auer E, Liao M, Fang X, Zhai T, Gautam U K, Lugstein A, Koide Y, Bando Y, Golberg D[J]. Nanoscale, 3, 1120(2011).

    [95] Tian W, Zhi C, Zhai T, Chen S M, Wang X, Liao M Y, Golberg D, Bando Y[J]. J. Mater. Chem., 22, 17984(2012).

    [96] Feng W, Wang X N, Zhang J, Wang L, Zheng W, Hu P, Cao W, Yang B[J]. J. Mater. Chem. C, 2, 3254(2014).

    [97] Teng Y, Song L X, Ponchel A, Yang Z K, Xia J[J]. Adv. Mater., 26, 6238(2014).

    [98] Zou R J, Zhang Z Y, Liu Q, Hu J Q, Sang L W, Liao M Y, Zhang W J[J]. Small, 10, 1848(2014).

    [99] Zhong M Z, Wei Z M, Meng X Q, Wu F, Li J[J]. J. Alloys Compd., 619, 572(2015).

    [100] Zhao B, Wang F, Chen H Y, Wang Y P, Jiang M M, Fang X S, Zhao D X[J]. Nano Lett., 15, 3988(2015).

    [101] Zhao B, Wang F, Chen H, Zheng L, Su L, Zhao D, Fang X[J]. Adv. Funct. Mater., 27, 1700264(2017).

    [102] Chen X, Liu K, Zhang Z, Wang C, Li B, Zhao H, Zhao D, Shen D[J]. ACS Appl. Mater. Interfaces, 8, 4185(2016).

    [103] Oh S, Kim J, Ren F, Pearton S J, Kim J[J]. J. Mater. Chem. C, 4, 9245(2016).

    [104] Kwon Y, Lee G, Oh S, Kim J, Pearton S J, Ren F[J]. Appl. Phys. Lett., 110, 131901(2017).

    [105] Oh S, Mastro M A, Tadjer M J, Kim J[J]. ECS J. Solid State. Sci., 6, Q79(2017).

    [106] Oh S, Kim C K, Kim J[J]. ACS Photonics, 5, 1123(2017).

    [107] Du J, Xing J, Ge C, Liu H, Liu P, Hao H, Dong J, Zheng Z, Gao H[J]. J. Phys. D: Appl. Phys., 49, 425105(2016).

    [108] He T, Zhao Y, Zhang X, Lin W, Fu K, Sun C, Shi F, Ding X, Yu G, Zhang K, Lu S, Zhang X, Zhang B[J]. Nanophotonics, 7, 1557(2018).

    [109] Oshima T, Okuno T, Arai N, Suzuki N, Ohira S, Fujita S[J]. Appl. Phys. Express, 1, 011202(2008).

    [110] Suzuki R, Nakagomi S, Kokubun Y, Arai N, Ohira S[J]. Appl. Phys. Lett., 94, 222102(2009).

    [111] Suzuki R, Nakagomi S, Kokubun Y[J]. Appl. Phys. Lett., 98, 131114(2011).

    [112] Kong W Y, Wu G A, Wang K Y, Zhang T F, Zou Y F, Wang D D, Luo L B[J]. Adv. Mater., 28, 10725(2016).

    [113] Mu W, Jia Z, Yin Y, Hu Q, Zhang J, Feng Q, Hao Y, Tao X[J]. CrystEngComm, 19, 5122(2017).

    [114] Yang C, Liang H, Zhang Z, Xia X, Tao P, Chen Y, Zhang H, Shen R, Luo Y, Du G[J]. RSC Adv., 8, 6341(2018).

    [115] Ji Z, Du J, Fan J, Wang W[J]. Opt. Mater., 28, 415(2006).

    [116] Kokubun Y, Miura K, Endo F, Nakagomi S[J]. Appl. Phys. Lett., 90, 031912(2007).

    [117] Weng W Y, Hsueh T J, Chang S J, Huang G J, Hsueh H T[J]. IEEE Sens. J., 11, 999(2011).

    [118] Huang Z D, Weng W Y, Chang S J, Chiu C, Wu S, Hsueh T[J]. IEEE Sens. J., 13, 3462(2013).

    [119] Huang Z D, Weng W Y, Chang S J, Hua Y F, Chiu C J, Hsueh T J, Wu S L[J]. IEEE Sens. J., 13, 1187(2013).

    [120] Huang Z D, Weng W Y, Chang S J, Hua Y F, Chiu C J, Tsai T Y[J]. IEEE Photonics Technol. Lett., 25, 809(2013).

    [121] Nakagomi S, Momo T, Takahashi S, Kokubun Y[J]. Appl. Phys. Lett., 103, 072105(2013).

    [122] Ravadgar P, Horng R H, Yao S D, Lee H Y, Wu R, Ou S L, Tu L W[J]. Opt. Express, 21, 24599(2013).

    [123] Guo D Y, Wu Z P, Li P G, An Y H, Liu H, Guo X C, Yan H, Wang G F, Sun C L, Li L H, Tang W H[J]. Opt. Mater. Express, 4, 1067(2014).

    [124] Wang X, Chen Z W, Guo D Y, Zhang X, Wu Z P, Li P G, Tang W H[J]. Opt. Mater. Express, 8, 2918(2018).

    [125] Peng Y K, Zhang Y, Chen Z W, Guo D Y, Zhang X, Li P G, Wu Z P, Tang W H[J]. IEEE Photonics Technol. Lett., 30, 993(2018).

    [126] Guo D Y, Wu Z P, An Y H, Guo X C, Chu X L, Sun C L, Li L H, Li P G, Tang W H[J]. Appl. Phys. Lett., 105, 023507(2014).

    [127] Guo D Y, Li P G, Wu Z P, Cui W, Zhao X L, Lei M, Li L H, Tang W H[J]. Sci. Rep., 6, 24190(2016).

    [128] Qian Y P, Guo D Y, Chu X L, Shi H Z, Zhu W K, Wang K, Wang S L, Li P G, Zhang X H, Tang W H[J]. Mater. Lett., 209, 558(2017).

    [129] Guo D Y, Qin X Y, Lv M, Shi H Z, Su Y L, Yao G S, Wang S L, Li C R, Li P G, Tang W H[J]. Electron. Mater. Lett., 13, 483(2017).

    [130] Zhao X L, Cui W, Wu Z P, Guo D Y, Li P G, An Y H, Li L H, Tang W H[J]. J. Electron. Mater., 46, 2366(2017).

    [131] Zhao X L, Wu Z P, Cui W, Zhi Y S, Guo D Y, Li L H, Tang W H[J]. ACS Appl. Mater. Interfaces, 9, 983(2017).

    [132] Zhao X L, Wu Z P, Guo D Y, Cui W, Li P G, An Y H, Li L H, Tang W H[J]. Semicond. Sci. Technol., 31, 065010(2016).

    [133] Zhao X L, Zhi Y S, Cui W, Guo D Y, Wu Z P, Li P G, Li L H, Tang W H[J]. Opt. Mater., 62, 651(2016).

    [134] Zhao X L, Wu Z P, Zhi Y S, An Y H, Cui W, Li L H, Tang W H[J]. J. Phys. D: Appl. Phys., 50, 085102(2017).

    [135] Zhang M, Liu G H, Gu X H, Zhou J R[J]. Journal of Nanoscience and Nanotechnology, 14, 3827(2014).

    [136] Li W H, Zhao X L, Zhi Y S, Zhang X H, Chen Z W, Chu X L, Yang H J, Wu Z P, Tang W H[J]. Appl. Opt., 57, 538(2018).

    [137] Guo D Y, Zhao X L, Zhi Y S, Cui W, Huang Y Q, An Y H, Li P G, Wu Z P, Tang W H[J]. Mater. Lett., 164, 364(2016).

    [138] Ai M L, Guo D Y, Qu Y Y, Cui W, Wu Z P, Li P G, Li L H, Tang W H[J]. J. Alloys Compd., 692, 634(2017).

    [139] An H Y, Chu X L, Huang Y Q, Zhi Y S, Guo D Y, Li P G, Wu Z P, Tang W H[J]. Prog. Nat. Sci., 26, 65(2016).

    [140] Cui W, Guo D Y, Zhao X L, Wu Z P, Li P G, Li L H, Cui C, Tang W H[J]. RSC Adv., 6, 100683(2016).

    [141] Huang Y Q, An Y H, Wu Z P, Guo D Y, Zhi Y S, Cui W, Zhao X L, Tang W H[J]. J. Alloys Compd., 717, 8(2017).

    [142] Guo D Y, Liu H, Li P G, Wu Z P, Wang S L, Cui C, Li C R, Tang W H[J]. ACS Appl. Mater. Interfaces, 9, 1619(2017).

    [143] Guo X C, Hao N H, Guo D Y, Wu Z P, An Y H, Chu X L, Li L H, Li P G, Lei M, Tang W H[J]. J. Alloys Compd., 660, 136(2016).

    [144] Guo D Y, Shi H Z, Qian Y P, Lv M, Li P G, Su Y L, Liu Q, Chen K, Wang S L, Cui C, Li C R, Tang W H[J]. Semicond. Sci. Technol., 32, 03LT1(2017).

    [145] Wu Z P, Jiao L, Wang X L, Guo D Y, Li W H, Li L H, Huang F, Tang W H[J]. J. Mater. Chem. C, 5, 8688(2017).

    [146] Li P G, Shi H Z, Chen K, Guo D Y, Cui W, Zhi Y S, Wang S L, Wu Z P, Chen Z W, Tang W H[J]. J. Mater. Chem. C, 5, 10562(2017).

    [147] Guo D Y, Su Y L, Shi H Z, Li P G, Zhao N, Ye J H, Wang S L, Liu A P, Chen Z W, Li C R, Tang W H[J]. ACS Nano, 12, 12827(2018).

    [148] An H Y, Zhi Y S, Wu Z P, Cui W, Zhao X L, Guo D Y, Li P G, Tang W H[J]. Appl. Phys. A, 122, 1036(2016).

    [149] Qu Y Y, Wu Z P, Ai M L, Guo D Y, An Y H, Yang H J, Li L H, Tang W H[J]. J. Alloys Compd., 680, 247(2016).

    [150] An Y H, Guo D Y, Li S Y, Wu Z P, Huang Y Q, Li P G, Li L H, Tang W H[J]. J. Phys. D: Appl. Phys., 49, 285111(2016).

    [151] Cui W, Zhao X L, An Y H, Guo D Y, Qing X Y, Wu Z P, Li P G, Li L H, Cui C, Tang W H[J]. J. Phys. D: Appl. Phys., 50, 135109(2017).

    [152] Guo P, Xiong J, Zhao X H, Sheng T, Yue C, Tao B W, Liu X Z[J]. J. Mater. Sci., 25, 3629(2014).

    [153] Hu G C, Shan C X, Zhang N, Jiang M M, Wang S P, Shen D Z[J]. Opt. Express, 23, 13554(2015).

    [154] Sheng T, Liu X Z, Qian L X, Xu B, Zhang Y Y[J]. Rare Met.(2015).

    [155] Yu F P, Ou S L, Wuu D S[J]. Opt. Mater. Express, 5, 1240(2015).

    [156] Liu X Z, Guo P, Sheng T, Qian L X, Zhang W L, Li Y R[J]. Opt. Mater., 51, 203(2016).

    [157] Qian L X, Liu X Z, Sheng T, Zhang W L, Li Y R, Lai P T[J]. AIP Adv., 6, 045009(2016).

    [158] Liu X Z, Yue C, Xia C T, Zhang W L[J]. Chin. Phys. B, 25, 017201(2016).

    [159] Qian L X, Wu Z H, Zhang Y Y, Lai P T, Liu X Z, Li Y R[J]. ACS Photonics, 4, 2203(2017).

    [160] Feng Q, Huang L, Han G, Li F, Li X, Fang L, Xing X, Zhang J, Mu W, Jia Z, Guo D, Tang W, Tao X, Hao Y[J]. IEEE Trans. Electron Devices, 63, 3578(2016).

    [161] Feng Z Q, Huang L, Feng Q, Li X, Zhang H, Tang W H, Zhang J C, Hao Y[J]. Opt. Mater. Express, 8, 2229(2018).

    [162] Huang L, Feng Q, Han G Q, Li F G, Li X, Fang L W, Xing X Y, Zhang J C, Hao Y[J]. IEEE Photonics J., 9, 6803708(2017).

    [163] Zhang K, Feng Q, Huang L, Hu Z Z, Feng Z Q, Li A, Zhou H, Lu X L, Zhang C F, Zhang J C, Hao Y[J]. IEEE Photonics J., 10, 6802508(2018).

    [164] Feng Q, Li X, Han G, Huang L, Li F, Tang W, Zhang J, Hao Y[J]. Opt. Mater. Express, 7, 1240(2017).

    [165] Xu Y, An Z Y, Zhang L X, Feng Q, Zhang J C, Zhang C F, Hao Y[J]. Opt. Mater. Express, 8, 2941(2018).

    [166] Ahn S, Lin Y H, Ren F, Oh S, Jung Y, Yang G, Kim J, Mastro M A, Hite J K, Eddy C R, Pearton S J[J]. J. Vac. Sci. Technol. B, 34, 041213(2016).

    [167] Ahn S, Ren F, Oh S, Jung Y, Kim J, Mastro M A, Hite J K, Eddy C R, Pearton S J[J]. J. Vac. Sci. Technol. B, 34, 041207(2016).

    [168] Alema F, Hertog B, Ledyaev O, Volovik D, Thoma G, Miller R, Osinsky A, Mukhopadhyay P, Bakhshi S, Ali H, Schoenfeld W V[J]. Phys. Status Solidi A, 1, 1600688(2017).

    [169] Cui S, Mei Z, Zhang Y, Liang H, Du X[J]. Adv. Opt. Mater., 17, 00454(2017).

    [170] Cui S J, Mei Z. X, Hou Y N, Chen Q S, Liang H L, Zhang Y H, Huo W X, Du X L[J]. Chin. Phys. B, 27, 067301(2018).

    [171] Lee S H, Kim S B, Moon Y J, Kim S M, Jung H J, Seo M S, Lee K M, Kim S K, Lee S W[J]. ACS Photonics, 4, 2937(2017).

    [172] Chen X H, Xu Y, Zhou D, Yang S, Ren F F, Lu H, Tang K, Gu S L, Zhang R, Zheng Y D, Ye J D[J]. ACS Appl. Mater. Interfaces, 9, 36997(2017).

    [173] Patil-Chaudhari D, Ombaba M, Oh J Y, Mao H, Montgomery K H, Lange A, Mahajan S, Woodall J M, Islam M S[J]. IEEE Photonics J., 9, 2300207(2017).

    [174] Rafique S, Han L, Zhao H P[J]. Phys. Status Solidi A, 214, 1700063(2017).

    [175] Pratiyush A S, Krishnamoorth S, Solanke S V, Xia Z B, Muralidharan R, Rajan S, Nath D N[J]. Appl. Phys. Lett., 110, 221107(2017).

    [176] Zhang D, Zheng W, Lin R C, Li T T, Zhang Z J, Huang F[J]. J. Alloys Compd., 735, 150(2018).

    [177] Lin R C, Zheng W, Zhang D, Zhang Z, Liao Q, Yang L, Huang F[J]. ACS Appl. Mater. Interfaces, 10, 22419(2018).

    [178] Jaiswal P, Muazzam U U, Pratiyush A S, Mohan N, Raghavan S, Muralidharan R, Shivashankar S A, Nath D N[J]. Appl. Phys. Lett., 112, 021105(2018).

    [179] Chen Y C, Lu Y J, Lin C N, Tian Y Z, Gao C J, Dong L, Shan C X[J]. J. Mater. Chem. C, 6, 5727(2018).

    [180] Arora K, Goel N, Kumar M, Kumar M[J]. ACS Photonics, 5, 2391(2018).

    [181] Shen H, Yin Y, Tian K, Baskaran K, Duan L, Zhao X, Tiwari A[J]. J. Alloys Compd., 766, 601(2018).

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