• Acta Physica Sinica
  • Vol. 68, Issue 7, 078501-1 (2019)
Dao-You Guo1, Pei-Gang Li2、3, Zheng-Wei Chen2, Zhen-Ping Wu2, and Wei-Hua Tang2、3、*
Author Affiliations
  • 1Center for Optoelectronics Materials and Devices, Department of Physics, Zhejiang Sci-Tech University, Hangzhou 310018, China
  • 2Laboratory of Information Functional Materials and Devices, School of Science, Beijing University of Posts and Telecommunications, Beijing 100876, China
  • 3State Key Laboratory of Information Photonics and Optical Communications, Beijing University of Posts and Telecommunications, Beijing 100876, China
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    DOI: 10.7498/aps.68.20181845 Cite this Article
    Dao-You Guo, Pei-Gang Li, Zheng-Wei Chen, Zhen-Ping Wu, Wei-Hua Tang. Ultra-wide bandgap semiconductor of β-Ga2O3 and its research progress of deep ultraviolet transparent electrode and solar-blind photodetector [J]. Acta Physica Sinica, 2019, 68(7): 078501-1 Copy Citation Text show less

    Abstract

    Gallium oxide (Ga2O3), with a bandgap of about 4.9 eV, is a new type of ultra-wide bandgap semiconductor material. The Ga2O3 can crystallize into five different phases, i.e. α, β, γ, δ, and ε-phase. Among them, the monoclinic β-Ga2O3 (space group: C2/m) with the lattice parameters of a = 12.23 , b = 3.04 , c = 5.80 , and β = 103.7° has been recognized as the most stable phase. The β-Ga2O3 can be grown in bulk form from edge-defined film-fed growth with a low-cost method. With a high theoretical breakdown electrical field (8 MV/cm) and large Baliga’s figure of merit, the β-Ga2O3 is a potential candidate material for next-generation high-power electronics (including diode and field effect transistor) and extreme environment electronics [high temperature, high radiation, and high voltage (low power) switching]. Due to a high transmittance to the deep ultraviolet-visible light with a wavelength longer than 253 nm, the β-Ga2O3 is a natural material for solar-blind ultraviolet detection and deep-ultraviolet transparent conductive electrode. In this paper, the crystal structure, physical properties and device applications of Ga2O3 material are introduced. And the latest research progress of β-Ga2O3 in deep ultraviolet transparent conductive electrode and solar-blind ultraviolet photodetector are reviewed. Although Sn doped Ga2O3 thin film has a conductivity of up to 32.3 S/cm and a transmittance greater than 88%, there is still a long way to go for commercial transparent conductive electrode. At the same time, the development history of β-Ga2O3 solar-blind ultraviolet photodetectors based on material type (nanometer, single crystal and thin film) is described in chronological order. The photodetector based on quasi-two-dimensional β-Ga2O3 flakes shows the highest responsivity (1.8 × 105 A/W). The photodetector based on ZnO/Ga2O3 core/shell micron-wire has a best comprehensive performance, which exhibits a responsivity of 1.3 × 103 A/W and a response time ranging from 20 ${\text{μ}}{\rm{s}}$ to 254 nm light at –6 V. We look forward to applying the β-Ga2O3 based solar-blind ultraviolet photodetectors to military (such as: missile early warning and tracking, ultraviolet communication, harbor fog navigation, and so on) and civilian fields (such as ozone hole monitoring, disinfection and sterilization ultraviolet intensity monitoring, high voltage corona detection, forest fire ultraviolet monitoring, and so on).
    Dao-You Guo, Pei-Gang Li, Zheng-Wei Chen, Zhen-Ping Wu, Wei-Hua Tang. Ultra-wide bandgap semiconductor of β-Ga2O3 and its research progress of deep ultraviolet transparent electrode and solar-blind photodetector [J]. Acta Physica Sinica, 2019, 68(7): 078501-1
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