[1] Cao X W, Zhang L, Yu Y S et al. Application of micro-optical components fabricated with femtosecond laser. Chinese Journal of Lasers, 44, 0102004(2017).
[2] Taylor L L, Xu J, Pomerantz M et al. Femtosecond laser polishing of germanium towards fabrication of freeform optics. //CLEO: Applications and Technology 2019, San Jose, May5-10, 2019, California United States, ATu3I.2(2019).
[3] Taylor L L, Qiao J, Qiao J. Femtosecond laser polishing of optical materials. Proceedings of SPIE, 9633, 96330M(2015).
[4] Li X G. Research on ultrafast laser polishing monocrystalline-silicon, 34-39(2015).
[5] Yuan J L, Wang Z W, Wen D H et al. Review of the current situation of ultra-precision machining. Chinese Journal of Mechanical Engineering, 43, 35-48(2007).
[6] Xu G, Dai Y T, Xiao X. Study on mathematical modeling and experiment of ultrashort laser polishing micro-processing. Chinese Journal of Lasers, 40, 0603003(2013).
[7] Yu B H. Ablation and micromachining of dielectrics with a femtosecond laser(2008).
[8] Thornber K K. Applications of scaling to problems in high-field electronic transport. Journal of Applied Physics, 52, 279-290(1981).
[9] Keldysh L V. Ionization in the field of a strong electromagnetic wave. Journal of Experimental and Theoretical Physics, 20, 1307-1314(1965).
[10] Carr C W, Radousky H B, Rubenchik A M et al. Localized dynamics during laser-induced damage in optical materials. Physical Review Letters, 92, 087401(2004).
[11] Jiang L, Tsai H L. Repeatable nanostructures in dielectrics by femtosecond laser pulse trains. Applied Physics Letters, 87, 151104(2005).
[12] Yuan L, Zhao Y A, He H B et al. Single-pulse and multi-pulse femtosecond laser damage of optical single films. High Power Laser and Particle Beams, 18, 595-598(2006).
[13] Renk K F. Basics of laser physics, 17-41(2011).
[14] Guo T Y, Zhang L M, Ren Y Y et al. Surface characteristics of CaF2 crystal ablated by femtosecond laser. Acta Optica Sinica, 39, 0126019(2019).
[15] Schaffer C B, Brodeur A, Mazur E. Laser-induced breakdown and damage in bulk transparent materials induced by tightly focused femtosecond laser pulses. Measurement Science and Technology, 12, 1784-1794(2001).
[16] Bloembergen N. Laser-induced electric breakdown in solids. IEEE Journal of Quantum Electronics, 10, 375-386(1974).