Lü Kexin, Xuesong Han. Research on Numerical Simulation of Ultrafast Laser Polishing Brittle Optical Materials[J]. Laser & Optoelectronics Progress, 2021, 58(5): 0532001
- Laser & Optoelectronics Progress
- Vol. 58, Issue 5, 0532001 (2021)
Fig. 1. Illustration of defocusing distance and incident angle
Fig. 2. Scanning results of laser pulses under different advance lengths. (a) 8 μm; (b) 4 μm
Fig. 3. Simulation results of laser polished surface
Fig. 4. Laser spot effective lap rate model
Fig. 5. Influence of defocusing distance on polishing results.(a) Influence of defocusing distance on linewidth of single line of polishing； (b) influence of defocusing distance on PV value of polished bottom
Fig. 6. Influence of incident angle on polishing results. (a) Influence of incident angle on linewidth of single line of polishing；(b) influence of incident angle on PV value of polished bottom
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