High-speed two-photon lithography based on femtosecond laser

Shunhua Yang; Chenliang Ding; Dazhao Zhu; Zhenyao Yang; Yong Liu; Cuifang Kuang; Xu Liu

doi:10.12086/oee.2023.220133

Journals >Opto-Electronic Engineering >Volume 50 >Issue 3 >Page 220133 > Article

Opto-Electronic Engineering
Vol. 50, Issue 3, 220133 (2023)

High-speed two-photon lithography based on femtosecond laser

Shunhua Yang¹, Chenliang Ding^1、*, Dazhao Zhu¹, Zhenyao Yang¹, Yong Liu^1、3, Cuifang Kuang^{1、2、4、**}, and Xu Liu^1、2

Author Affiliations

¹Research Center for Intelligent Chips and Devices, Zhejiang Lab, Hangzhou, Zhejiang 311121, China

²State Key Laboratory of Extreme Photonics and Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou, Zhejiang 310027, China

³College of Electronics and Information Engineering, Shanghai University of Electric Power, Shanghai 200090, China

⁴ZJU-Hangzhou Global Scientific and Technological Innovation Center, Hangzhou, Zhejiang 311200, China

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DOI: 10.12086/oee.2023.220133 Cite this Article

Shunhua Yang, Chenliang Ding, Dazhao Zhu, Zhenyao Yang, Yong Liu, Cuifang Kuang, Xu Liu. High-speed two-photon lithography based on femtosecond laser[J]. Opto-Electronic Engineering, 2023, 50(3): 220133 Copy Citation Text

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References

[8] Baldacchini T. Three-Dimensional Microfabrication Using Two-Photon Polymerization[M]. 2nd ed. Norwich: William Andrew, 2020.

[16] Sanli U T, Messer T, Weigand M, et al. High-resolution kinoform X-ray optics printed via 405 nm 3D laser lithography[J]. Adv Mater Technol, 2022,doi: 10.1002/admt.202101695.

[43] Tang J B. Three dimensional confocal imaging based on beam scanning technology[D]. Harbin: Harbin Institute of Technology, 2011.

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