• Opto-Electronic Engineering
  • Vol. 50, Issue 3, 220133 (2023)
Shunhua Yang1, Chenliang Ding1、*, Dazhao Zhu1, Zhenyao Yang1, Yong Liu1、3, Cuifang Kuang1、2、4、**, and Xu Liu1、2
Author Affiliations
  • 1Research Center for Intelligent Chips and Devices, Zhejiang Lab, Hangzhou, Zhejiang 311121, China
  • 2State Key Laboratory of Extreme Photonics and Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou, Zhejiang 310027, China
  • 3College of Electronics and Information Engineering, Shanghai University of Electric Power, Shanghai 200090, China
  • 4ZJU-Hangzhou Global Scientific and Technological Innovation Center, Hangzhou, Zhejiang 311200, China
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    DOI: 10.12086/oee.2023.220133 Cite this Article
    Shunhua Yang, Chenliang Ding, Dazhao Zhu, Zhenyao Yang, Yong Liu, Cuifang Kuang, Xu Liu. High-speed two-photon lithography based on femtosecond laser[J]. Opto-Electronic Engineering, 2023, 50(3): 220133 Copy Citation Text show less

    Abstract

    Two-photon polymerization (TPP) based on femtosecond laser has been a research hotspot in 3D micro/nano writing technology. With the increasing demand for processing complex and large-scale miniaturized 3D devices in the fields of life science, material engineering, micro and nano optics, and etc., the issue of low processing efficiency of TPP is becoming increasingly serious. During the long fabrication period, many disturbances can be introduced in the processing, causing the quality deterioration of the structure and seriously hindering the further popularization and application of these crucial 3D devices. This paper respectively compares the four approaches of single-beam writing, parallel multi-beam writing, pattern projection, and 3D projection exposure based on the TPP lithography efficiency. Moreover, the researches on the optical design of system, the writing accuracy, the fabrication throughput, the writing strategy, and etc. of each approach are also described. And the advantages and disadvantages of these four methods are summerized simultaneously. Finally, we also made a brief prospect to the developing trend of TPL efficiency improvement in the future.
    Shunhua Yang, Chenliang Ding, Dazhao Zhu, Zhenyao Yang, Yong Liu, Cuifang Kuang, Xu Liu. High-speed two-photon lithography based on femtosecond laser[J]. Opto-Electronic Engineering, 2023, 50(3): 220133
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