• Infrared and Laser Engineering
  • Vol. 45, Issue 12, 1217005 (2016)
Lin Cunbao1、*, Yan Shuhua1, You Fusheng2, and Du Zhiguang1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: 10.3788/irla201645.1217005 Cite this Article
    Lin Cunbao, Yan Shuhua, You Fusheng, Du Zhiguang. Synthetical modeling and experimental study of fabrication and assembly errors of two-dimensional gratings[J]. Infrared and Laser Engineering, 2016, 45(12): 1217005 Copy Citation Text show less
    References

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    [2] Lin Cunbao, Yan Shuhua, Du Zhiguang, et al. Symmetrical short-period and high signal-to-noise ratio heterodyne grating interferometer[J]. Chinese Optics Letters, 2015, 13(10): 100501.

    [3] Hsieh H, Pan S. Development of a grating-based interferometer for six-degree-of-freedom displacement and angle measurements[J]. Optics Express, 2015, 23(3): 2451-2465.

    [4] Mi Xiaotao, Yu Hongzhu, Yu Haili, et al. Analysis and improvement of rod structures for large diffraction grating ruling engines[J]. Optics and Precision Engineering, 2015, 23(3): 745-752. (in Chinese)

    [5] Jiang Yanxiu, Bayan Heshig, Zhao Xulong, et al. Plane holographic varied-line-space grating for DCLS in EUV region[J]. Optics and Precision Engineering, 2015, 23(8): 2117-2124. (in Chinese)

    [6] Liu Yongmeng, Yuan Maoqiang, Cao Jieru, et al. Use of two planar gratings to measure 3-DOF displacements of planar moving stage[J]. IEEE Transactions on Instrumentation & Measurement, 2015, 64(1): 163-169.

    [7] Wang Xuanze, Dong Xiaohua, Guo Jun, et al. Two-dimensional displacement sensing using a cross diffraction grating scheme[J]. Journal of Optics A: Pure and Applied Optics, 2004, 6(1): 106-111.

    [8] Hsieh H, Chen J, Leronde G, et al. Two-dimensional displacement measurement by quasi-common-optical path heterodyne grating interferometer[J]. Optics Express, 2011, 19(10): 9770-9782.

    [9] Xian Guang, Yan Changxiang. Analysis of attitude change impact on aerial push-broom imaging[J]. Infrared and Laser Engineering, 2015, 44(8): 2178-2183. (in Chinese)

    [10] Lin Cunbao, Yan Shuhua, Du Zhiguang, et al. High-efficiency gold-coated cross-grating for heterodyne grating interferometer with improved signal contrast and optical subdivision[J]. Optics Communications, 2015, 339(15): 86-93.

    [11] Yang Dongxing, Yan Shuhua, Du Liebo, et al. Design of a miniature single-grating displacement measuring system with nanometer resolution[J]. Infrared and Laser Engineering, 2013, 42(4): 1020-1025. (in Chinese)

    [12] Peng Lirong, Ma Zhanlong, Wang Gaowen, et al. Key technology of ultra-thin optical element precision manufacture[J]. Chinese Optics, 2015, 8(6): 964-970. (in Chinese)

    [13] Tao Xiaoping. Precise alignment method of online optical testing for large-aperture mirror fabrication[J]. Chinese Optics, 2015, 8(6): 1027-1034. (in Chinese)

    [14] Awtar S, Slocum A. Target block alignment error in XY stage metrology[J]. Precision Engineering, 2007, 31(3): 185-187.

    Lin Cunbao, Yan Shuhua, You Fusheng, Du Zhiguang. Synthetical modeling and experimental study of fabrication and assembly errors of two-dimensional gratings[J]. Infrared and Laser Engineering, 2016, 45(12): 1217005
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