• Laser & Optoelectronics Progress
  • Vol. 59, Issue 4, 0405001 (2022)
Feng Gao, Chenyue Zhu, Jingyue Li, Chunyan Wu*, and Linbao Luo
Author Affiliations
  • School of Electronic Science and Applied Physics, Hefei University of Technology, Hefei , Anhui 230601, China
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    DOI: 10.3788/LOP202259.0405001 Cite this Article Set citation alerts
    Feng Gao, Chenyue Zhu, Jingyue Li, Chunyan Wu, Linbao Luo. ITO-Based Active Metasurfaces with Phase Tunability[J]. Laser & Optoelectronics Progress, 2022, 59(4): 0405001 Copy Citation Text show less

    Abstract

    Transparent conductive oxides have been widely used in optoelectronic devices owing to their special optical property. In near-infrared wavelength region, the real part of the dielectric constant will decrease from positive to negative. Within epsilon-near-zero (ENZ) region, strong interaction will occur between light and matter, and wide phase modulation will be achieved. Herein, using a bias voltage of 0-5 V, the carrier concentration within a region (thickness: 1 nm) near the interface of an ITO-based MOS structure was adjusted, and a phase modulation close to 265° in a 1470-nm wavelength was achieved. Based on this modulation, the practical applications of the proposed structure in the fields of beam deflection and focusing have been explored. Furthermore, a dual-gated MOS structure, which further expanded the phase coverage region, was designed.
    Feng Gao, Chenyue Zhu, Jingyue Li, Chunyan Wu, Linbao Luo. ITO-Based Active Metasurfaces with Phase Tunability[J]. Laser & Optoelectronics Progress, 2022, 59(4): 0405001
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