• Laser & Optoelectronics Progress
  • Vol. 57, Issue 15, 151202 (2020)
Haijiao Yu1 and Guogang Zhao2、*
Author Affiliations
  • 1College of Electrical and Information, Jilin University of Architecture and Technology, Changchun, Jilin 130114, China
  • 2College of Computer Science and Engineering, Jilin University of Architecture and Technology, Changchun, Jilin 130114, China
  • show less
    DOI: 10.3788/LOP57.151202 Cite this Article Set citation alerts
    Haijiao Yu, Guogang Zhao. Improving Measurement Accuracy of Dual-Frequency Laser Interferometer Based on Vibration Node Optimization[J]. Laser & Optoelectronics Progress, 2020, 57(15): 151202 Copy Citation Text show less
    References

    [1] Chen H F, Ding X M, Zhong Z et al. High acceleration ultra-precision measurement model in laser heterodyne interferometry[J]. Opto-Electronic Engineering, 34, 72-75(2007).

    [2] Brand U, Herrmann K. A laser measurement system for the high-precision calibration of displacement transducers[J]. Measurement Science and Technology, 7, 911-917(1996).

    [3] Chi F, Zhu Y, Zhang Z P et al. Environment compensation technologies in dual-frequency laser interferometer measurement system[J]. Chinese Journal of Lasers, 41, 0408004(2014).

    [4] Li D G, Zhang G X, Li G T. Improving the accuracy of laser interferometry[J]. Journal of Beijing Institute of Technology, 20, 621-625(2000).

    [5] Lee C K, Wu T W. Differential laser interferometer for nanometer displacement measurements[J]. AIAA Journal, 33, 1675-1680(1995).

    [6] Qi Y Y, Zhao M R, Lin Y C. Methods of improving accuracy of laser interferometry system[J]. Journal of Tianjin University, 39, 989-993(2006).

    [7] Wang C, Augousti A T, Mason J. Real time evaluation and correction of nonlinear errors in single frequency interferometers[J]. Transactions of the Institute of Measurement and Control, 22, 405-412(2000).

    [8] Xu W, King T. Flexure hinges for piezoactuator displacement amplifiers: flexibility, accuracy, and stress considerations[J]. Precision Engineering, 19, 4-10(1996).

    [9] Fujita T, Tagawa Y, Kajiwara K et al. Active 6-DOF micro-vibration control system using piezoelectric actuators. [C]∥International Conference on Adaptive Structures, November 9-11, 1993, San Diego, CA. [S.l.: s.n.], 514-528(1993).

    [10] Nakamura Y, Nakayama M, Masuda K et al. Development of active 6-DOF micro-vibration control system using giant magnetostrictive actuator[J]. Proceedings of SPIE, 3671, 229-240(1999).

    [11] Hu H Y. On noderule of a natural mode-shape[J]. Journal of Dynamics and Control, 16, 193-200(2018).

    [12] Routh E J[M]. Dynamics of a system of rigid bodies London: Macmillan and Co., 1892, 42-48.

    [13] Rayleigh L. The theory of sound[M]. 2nd ed. London: Macmillan and Co., 60-65(1945).

    [14] Гантмахер Ф Р, Крейн М Г[M]. Осцилляционные матрицы и ядра и малые колебания механических систем, 30-35(1950).

    [15] Meirovitch L. Elements of vibration analysis[M]. 2nd ed. New York: McGraw-Hill Book Company, 10-28(1986).

    Haijiao Yu, Guogang Zhao. Improving Measurement Accuracy of Dual-Frequency Laser Interferometer Based on Vibration Node Optimization[J]. Laser & Optoelectronics Progress, 2020, 57(15): 151202
    Download Citation