Haijiao Yu, Guogang Zhao. Improving Measurement Accuracy of Dual-Frequency Laser Interferometer Based on Vibration Node Optimization[J]. Laser & Optoelectronics Progress, 2020, 57(15): 151202
- Laser & Optoelectronics Progress
- Vol. 57, Issue 15, 151202 (2020)
Fig. 1. Working principle diagram of dual frequency laser interferometer
Fig. 2. Distribution diagram of triaxial length interferometer
Fig. 3. Arrangement of interferometer and accelerometer on L-shaped marble
Fig. 4. Test results of frequency response function of L-shaped marble and interferometer
Fig. 5. Test results of frequency response function of honeycomb panel
Fig. 6. Distribution of accelerometer on CCR and Z axis direction moving metal plate
Fig. 7. Test results of frequency response function of movable mechanism and mirror. (a) Vibration frequency response function of metal plate in X/Y axis direction; (b) vibration frequency response function of three measuring mirrors
Fig. 8. Measurement repeatability of triaxial interferometer without external vibration
Fig. 9. Fourier spectrum analysis of repeatable measurement data without external vibration
Fig. 10. Measurement repeatability of three-axis interferometer under closed loop of Z-axis motion mechanism
Fig. 11. Fourier spectrum analysis of repeatability measurement data under closed loop of Z-axis motion mechanism
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