Zhongyu Chen, Shaoyun Yin, Xiuhui Sun, Haibo Jiang, Chunlei Du. Design of Fly-Eye Lens with Free-Form Surface Used in Parallel Light Exposure Machine with Large Area and High Uniformity[J]. Laser & Optoelectronics Progress, 2018, 55(4): 042201
- Laser & Optoelectronics Progress
- Vol. 55, Issue 4, 042201 (2018)
Fig. 1. (a) Optical system of exposure machine; (b) smoothing principle of fly-eye lens
Fig. 2. Target surface spot when the integrator is (a) lens and (b) spherical mirror, respectively
Fig. 3. Target surface spot with parallel light incidence at single angle. (a) 0°; (b) 14°
Fig. 4. Light path diagram of exposure machine
Fig. 5. Illuminance distribution of target surface spot
Fig. 6. Sketch diagram of light and vector relation
Fig. 7. (a) Contour lines of free-form surface and sphere; (b) schematic diagram of free-form surface; (c) free-form surface lens array model
Fig. 8. (a) Spot and (b) illuminance distribution curve of target surface with traditional fly-eye lens
Fig. 9. (a) Spot and (b) illuminance distribution curve of target surface with free-form surface fly-eye lens
|
Table 1. Relationship change between uniformity of target surface spot and beam center
Set citation alerts for the article
Please enter your email address
© Copyright 2018-2021 | Chinese Laser Press. All Rights Reserved 沪ICP备15018463号-20