Segmented Mirror Edge Sensors Based on Equal Thickness Interference

Heng Zuo; Xi Zhang; Yong Zhang

doi:10.3788/AOS202141.1212002

[1] Esposito S, Pinna E, Tozzi A et al. Cophasing of segmented mirrors using the pyramid sensor[J]. Proceedings of SPIE, 5169, 72-78(2003). http://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1318865

[2] Zhang Y, Zhang L, Liu G R et al. Experimental study of segmented mirrors co-phase using dispersed fringe sensor[J]. Acta Optica Sinica, 31, 0212004(2011).

[3] Jared R C, Arthur A A, Andreae S et al. The W. M. Keck Telescope segmented primary mirror active control system[J]. Proceedings of SPIE, 1236, 996-1008(1990). http://spie.org/Publications/Proceedings/Paper/10.1117/12.19268

[4] Mast T, Chanan G, Nelson J et al. Edge sensor design for the TMT[J]. Proceedings of SPIE, 6267, 62672S(2006). http://spie.org/Publications/Proceedings/Paper/10.1117/12.672028

[5] Wasmeier M, Hackl J, Leveque S. Inductive sensors based on embedded coil technology for nanometric inter-segment position sensing of the E-ELT[J]. Proceedings of SPIE, 9145, 91451R(2014).

[6] Zhang H G, Wu J G, Zheng Y Z[J]. Nanometer accurate position technology Instrument Technique and Sensor, 2001, 3-5.

[7] Wang H B, Ju B, Li W et al. Ultrastable eddy current displacement sensor working in harsh temperature environments with comprehensive self-temperature compensation[J]. Sensors and Actuators A, 211, 98-104(2014).

[8] Zhang Y, Wang Q M, Li Y P et al. Research progress of co-phasing inductance edge sensor for Chinese extremely large telescope[J]. Proceedings of SPIE, 9145, 91454Y(2014). http://spie.org/x648.xml?product_id=2056332

[9] Xie H H, Peng Y X, Meng D P et al. Newton's ring and its new discovery[J]. Proceedings of SPIE, 6028, 602825(2005). http://spie.org/Publications/Proceedings/Paper/10.1117/12.667338

[10] Feng M C, Xu L, Wang Y J. Collimation factors and performance analysis based on Michelson interferometer[J]. Laser & Optoelectronics Progress, 57, 132201(2020).

[11] de Groot P. Light: introduction to optics and photonics[M]. ∥Judith F,Donnelly N M M. Boston, MA, USA: New England Board of Higher Education, 180-184(2007).

[12] Lu J, Ni X W, He A Z. Equal-thickness-fringe multiple reflection interferometer for ultra-high-speed interference recording[J]. Optical Engineering, 35, 1772-1774(1996). http://adsabs.harvard.edu/abs/1996OptEn..35.1772L

[13] Nascov V, Dobroiu A, Apostol D et al. Statistical errors on Newton fringe pattern digital processing[J]. Proceedings of SPIE, 5581, 788-796(2004).

[14] Wahl K J, Chromik R R, Lee G Y. Quantitative in situ measurement of transfer film thickness by a Newton's rings method[J]. Wear, 264, 731-736(2008). http://www.sciencedirect.com/science/article/pii/S0043164807005327

[15] Nascov V, Dobroiu A, Apostol D et al. Automatic digital processing of Newton's rings fringe patterns[J]. Proceedings of SPIE, 4430, 835-841(2001).

[16] Xu D H, Tang X H, Fang G M et al. Method for calibration of optical axis parallelism based on interference fringes[J]. Acta Optica Sinica, 40, 1712005(2020).

[18] Duda R O, Hart P E. Use of the Hough transformation to detect lines and curves in pictures[J]. Communications of the ACM, 15, 11-15(1972). http://ci.nii.ac.jp/naid/110002719244

[19] Wu S L, Hu H R, Zhong S M et al. Automatic extraction of speckle interference fringe regions[J]. Acta Optica Sinica, 39, 1212004(2019).